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US 5,704,967 AGranted
Fluid storage and delivery system comprising high work capacity physical sorbent
AssigneeAdvanced Technology Materials, Inc.
InventorsGlenn M. Tom, James V. McManus, W. Karl Olander
Life of this patent
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Abstract
An adsorption-desorption apparatus, for storage and dispensing of a sorbable gas, wherein a physical sorbent medium bearing the adsorbed gas to be selectively dispensed is delivered by pressure differential desorption and/or thermal desorption of the sorbate gas from the sorbent material. The sorbent material preferably comprises a material which is characterized by a Sorbent Working Capacity, measured for arsine at 40 Torr and at 650 Torr, of at least 50 grams arsine per liter of bed of the sorbent material.
Claims26
An adsorption-desorption apparatus, for storage and dispensing of a sorbable fluid, said apparatus comprising:
- a storage and dispensing vessel constructed and arranged for holding a solid-phase physical sorbent medium, and for selectively flowing fluid into and out of said vessel;
- a solid-phase physical sorbent medium disposed in said storage and dispensing vessel at an interior gas pressure;
- a sorbable fluid physically adsorbed on said solid-phase physical sorbent medium;
- and
- a dispensing assembly coupled in gas flow communication with the storage and dispensing vessel, and constructed and arranged:
- (I) to provide, exteriorly of said storage and dispensing vessel, a pressure below said interior pressure, to effect desorption of sorbable fluid from the solid-phase physical sorbent medium, and fluid flow of desorbed fluid through the dispensing assembly;
- and/or
- (II) to flow thermally desorbed fluid therethrough, and comprising means for heating the sorbent medium to effect desorption of the fluid therefrom, so that the desorbed fluid flows from the vessel into the dispensing assembly,
- wherein the apparatus is characterized by at least one of the following characteristics (i)-(iii):
- (i) the sorbent medium has a Percent Desorbable Sorbate for arsine gas of at least 15%;
- (ii) the sorbent medium has a Sorbent Working Capacity, measured for arsine gas at 40 Torr and at 650 Torr, of at least 50;
- and
- (iii) the apparatus constitutes a compact, portable, point-of-use source fluid storage and dispensing system, and said interior gas pressure is less than 1200 Torr.
10 more elements
An adsorption-desorption apparatus, for storage and dispensing of a sorbable fluid, said apparatus comprising:
- a storage and dispensing vessel constructed and arranged for holding a solid-phase physical sorbent medium, and for selectively flowing fluid into and out of said vessel;
- a solid-phase physical sorbent medium disposed in said storage and dispensing vessel at an interior gas pressure;
- a sorbable fluid physically adsorbed on said solid-phase physical sorbent medium;
- and
- a dispensing assembly coupled in gas flow communication with the storage and dispensing vessel, and constructed and arranged:
- (i) to provide, exteriorly of said storage and dispensing vessel, a pressure below said interior pressure, to effect desorption of sorbable fluid from the solid-phase physical sorbent medium, and fluid flow of desorbed fluid through the dispensing assembly;
- and/or
- (ii) to flow thermally desorbed fluid therethrough, and comprising means for heating the sorbent medium to effect desorption of the fluid therefrom, so that the desorbed fluid flows from the vessel into the dispensing assembly,
- wherein the sorbent medium is characterized by a Percent Desorbable Sorbate for arsine gas of at least 15%.
6 more elements
(Amended) An adsorption-desorption apparatus, for storage and dispensing of a sorbable fluid, said apparatus comprising:
- a storage and dispensing vessel constructed and arranged for holding a solid-phase physical sorbent medium, and for selectively flowing fluid into and out of said vessel;
- a solid-phase physical sorbent medium disposed in said storage and dispensing vessel at an interior gas pressure;
- a sorbable fluid physically adsorbed on said solid-phase physical sorbent medium;
- and
- a dispensing assembly coupled in gas flow communication with the storage and dispensing vessel, and constructed and arranged:
- (i) to provide, exteriorly of said storage and dispensing vessel, a pressure below said interior pressure, to effect desorption of sorbable fluid from the solid-phase physical sorbent medium, and fluid flow of desorbed fluid through the dispensing assembly;
- and/or
- (ii) to flow thermally desorbed fluid therethrough, and comprising means for heating the sorbent medium to effect desorption of the fluid therefrom, so that the desorbed fluid flows from the vessel into the dispensing assembly,
- wherein the sorbent has a Sorbent Working Capacity, measured for arsine gas at 40 Torr and at 650 Torr, at least 50.
6 more elements
A compact, portable, point-of-use adsorption-desorption apparatus, for storage and dispensing of a sorbable fluid, said apparatus comprising:
- a storage and dispensing vessel constructed and arranged for holding a solid-phase physical sorbent medium, and for selectively flowing fluid into and out of said vessel;
- a solid-phase physical sorbent medium disposed in said storage and dispensing vessel at an interior gas pressure not exceeding 1200 Torr;
- a sorbable fluid physically adsorbed on said solid-phase physical sorbent medium;
- and
- a dispensing assembly coupled in gas flow communication with the storage and dispensing vessel, and constructed and arranged:
- (i) to provide, exteriorly of said storage and dispensing vessel, a pressure below said interior pressure, to effect desorption of sorbable fluid from the solid-phase physical sorbent medium, and fluid flow of desorbed fluid through the dispensing assembly;
- and/or
- (ii) to flow thermally desorbed fluid therethrough, and comprising means for heating the sorbent medium to effect desorption of the fluid therefrom, so that the desorbed fluid flows from the vessel into the dispensing assembly.
5 more elements
Dependencies are inferred from the claim text.