# US 5,704,827 A · Polishing apparatus including cloth cartridge connected to turntable > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,704,827 A - Document ID: US5704827A - Status: Granted - Kind: A - Application number: 08/544,534 - Filed: 1995-10-18 - Granted: 1998-01-06 - Earliest claimed: 1994-10-19 - Assignees: Ebara Corporation; Kabushiki Kaisha Toshiba - Inventors: Toyomi Nishi; Manabu Tsujimura; Tamami Takahashi; Hiromi Yajima; Riichiro Aoki; Yukio Imoto; Shoichi Kodama; Kazuaki Himukai; Gisuke Kouno; Takanobu Nishimura - Web page: https://patentgrep.com/patent/US5704827A ## CPC - B24B 37/12: Lapping plates for working plane surfaces - B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth B23F, of screw-threads B23G1/36; by electro-erosion B23H; abrasive or related blasting B24C; tools for grinding, buffing or sharpening B24D; polishing compositions C09G1/00; abrasives C09K3/14; electrolytic etching or polishing C25F3/00; grinding arrangements for use on assembled railway tracks E01B31/17); DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS ## Abstract A polishing apparatus includes a detachable light weight cloth cartridge which shows little deformation under uneven loading during a polishing operation. Either mechanical or non-mechanical fixation of the cloth cartridge to a turntable is achieved. Mechanical fixation involves attaching the cloth cartridge to the turntable at peripheral and center sections of the cloth cartridge. Non-mechanical fixation involves attaching the cloth cartridge to the turntable by a vacuum arrangement. The assembly of the cloth cartridge and the turntable not only produces excellent flatness on polished semiconductor wafers by maintaining a level polishing surface, but also improves the production yield by preventing breakage of wafers during the polishing process. ## Claims ### Claim 1 A polishing apparatus for polishing a surface of an object to a flat and mirror finish, said apparatus comprising: a rotatable turntable; a cloth cartridge including a base member and a polishing cloth bonded to said base member; said cloth cartridge having a peripheral section and a central section detachably connected directly at a peripheral section and at a central section, respectively, of said turntable, such that said cloth cartridge is rotatable with said turntable; supply means for delivering a polishing solution to a polishing surface of said polishing cloth; and pressing means for pressing an object to be polished onto said polishing surface of said polishing cloth. ### Claim 2 (depends on 1) An apparatus as claimed in claim 1, wherein said peripheral section and said central section of said cloth cartridge comprise peripheral and central portions, respectively, of said base member. ### Claim 3 (depends on 2) An apparatus as claimed in claim 2, further comprising bolts detachably connecting said peripheral and central portions to said peripheral and central sections, respectively, of said turntable. ### Claim 4 (depends on 1) An apparatus as claimed in claim 1, wherein said cloth cartridge is disc-shaped and has a ratio t/d of thickness t to diameter d in a range of from 0.005 to 0.05. ### Claim 5 (depends on 1) An apparatus as claimed in claim 1, wherein said cloth cartridge and said turntable have interfitting structure operable to prevent slipping of said cloth cartridge relative to said turntable during rotation thereof. ### Claim 6 (depends on 5) An apparatus as claimed in claim 5, wherein said interfitting structure comprises a groove formed in one of said base member and said turntable and a protrusion extending from the other of said base member and said turntable, said protrusion fitting into said groove. ### Claim 7 (depends on 6) An apparatus as claimed in claim 6, wherein said groove and said protrusion extend peripherally of said base member and said turntable. ### Claim 8 (depends on 1) An apparatus as claimed in claim 1, further comprising a cover member positionable on said base member to entirely cover said polishing cloth when not in use for polishing operation. ### Claim 9 (depends on 1) An apparatus as claimed in claim 1, wherein said cloth cartridge has a handle to facilitate detachment and transportation thereof. ### Claim 10 (depends on 1) An apparatus as claimed in claim 1, wherein said base member is made of a material selected from the group consisting of steel alloys, aluminum alloys and plastic materials. ### Claim 11 An assembly to be used as part of a polishing apparatus for polishing a surface of an object to a flat and mirror finish, said assembly comprising: a rotatable turntable; a cloth cartridge including a base member and a polishing cloth bonded to said base member; and said cloth cartridge having a peripheral section and a central section detachably connected directly at a peripheral section and at a central section, respectively, of said turntable, such that said cloth cartridge is rotatable with said turntable. ### Claim 12 (depends on 11) An assembly as claimed in claim 11, wherein said peripheral section and said central section of said cloth cartridge comprise peripheral and central portions, respectively, of said base member. ### Claim 13 (depends on 12) An assembly as claimed in claim 12, further comprising bolts detachably connecting said peripheral and central portions to said peripheral and central sections, respectively, of said turntable. ### Claim 14 (depends on 11) An assembly as claimed in claim 11, wherein said cloth cartridge is disc-shaped and has a ratio t/d of thickness t to diameter d in a range of from 0.005 to 0.05. ### Claim 15 (depends on 11) An assembly as claimed in claim 11, wherein said cloth cartridge and said turntable have interfitting structure operable to prevent slipping of said cloth cartridge relative to said turntable during rotation thereof. ### Claim 16 (depends on 15) An assembly as claimed in claim 15, wherein said interfitting structure comprises a groove formed in one of said base member and said turntable and a protrusion extending from the other of said base member and said turntable, said protrusion fitting into said groove. ### Claim 17 (depends on 16) An assembly as claimed in claim 16, wherein said groove and said protrusion extend peripherally of said base member and said turntable. ### Claim 18 (depends on 11) An assembly as claimed in claim 11, further comprising a cover member positionable on said base member to entirely cover said polishing cloth when not in use for polishing operation. ### Claim 19 (depends on 11) An assembly as claimed in claim 11, wherein said cloth cartridge has a handle to facilitate detachment and transportation thereof. ### Claim 20 (depends on 11) An assembly as claimed in claim 11, wherein said base member is made of a material selected from the group consisting of steel alloys, aluminum alloys and plastic materials.