# US 5,704,493 A · Substrate holder

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- Number: US 5,704,493 A
- Document ID: US5704493A
- Status: Granted
- Kind: A
- Application number: 08/578,860
- Filed: 1995-12-27
- Granted: 1998-01-06
- Earliest claimed: 1995-12-27
- Assignees: Dainippon Screen Mfg. Co., Ltd.
- Inventors: Kazunori Fujikawa; Kenji Yasui; Hisao Nishizawa
- Web page: https://patentgrep.com/patent/US5704493A

## CPC

- H10P 72/13: {Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

Semiconductor substrates are held by a substrate holder having a parallel arrangement of bridges, and are capable of being dipped in processing liquids by the holder. Each bridge has an alternate arrangement of teeth and valleys to define Y-shaped notches. Vent holes are formed in the bottoms of the notches for ready drainage of processing liquids. The substrates are held in the notches while contacting only the walls of the notches. Thus, there is minimum contact between the substrates and the substrate holder. When the holder is lifted up from the processing liquid, part of the processing liquid remaining around the contacts between the substrates and the valleys drain through the vent holes, which attributes to the rapid drying of the substrates.

## Claims

### Claim 1

A substrate holder for holding substrates standing straight to process respective surfaces of said substrates with said substrates having first and second major surfaces, said substrate holder comprising:
a) a first plate on which first teeth directed up and defining first valleys between said first teeth are formed;
b) a second plate on which second teeth directed up and defining second valleys between said second teeth are formed; and
c) a third plate on which third teeth directed up and defining third valleys between said third teeth are formed; wherein
said second and third plates are arranged in parallel,
said first plate is inserted between said second and third plates in parallel to said second and third plates,
said second and third valleys are aligned with each other in the direction of parallelism of said first, second and third plates and said first valleys are staggered with respect to said second and third valleys in the direction of parallelism so that said substrates are capable of being held by said first to third plates such that
said first major surfaces are supported by walls of said first valleys only, and
said second major surfaces are supported by walls of said second and third valleys only.

### Claim 2

A substrate holder, comprising: bridges arrayed in parallel for holding substrates so as to process respective surfaces of said substrates, each of said bridges having,
a) a bridge body; and
b) teeth arrayed on said bridge body and said teeth defining valleys therebetween, said valleys capable of receiving said substrates, and
side recesses disposed on at least one side of said bridge body and said teeth such that steps are defined between said side recesses and walls of said valleys.

### Claim 3

A substrate holder, comprising: bridges arrayed in parallel for holding substrates so as to process respective surfaces of said substrates, each of said bridges having,
a) a bridge body;
b) teeth arrayed on said bridge body and said teeth defining valleys therebetween, said valleys capable of receiving said substrates, and
c) projections provided on walls of said valleys, said projections protruding toward opposing walls of said valleys, and respective widths of said valleys being larger than respective thicknesses of said substrates capable of being received in said valleys.

### Claim 4

A substrate holder, comprising: bridges arrayed in parallel for holding substrates so as to process respective surfaces of said substrates, at least one of said bridges having,
a) a plurality of plates adapted to stand vertically upright and arranged in parallel, each of said plurality of plates having a plate body, and teeth arrayed on said plate body and defining Y-shaped or V-shaped valleys between said teeth, said valleys capable of receiving said substrates; and
b) means for defining gaps between said plurality of plates smaller than gaps between said bridges.

### Claim 5 (depends on 3)

The substrate holder of claim 3, wherein each of said bridges further includes vent holes at the bottoms of said valleys, each vent hole having a diameter larger than a thickness of a substrate capable of being received in said valley.

### Claim 6 (depends on 4)

The substrate holder of claim 4, for holding substrates having first major surfaces and second major surfaces, respectively,
said plurality of plates including:
a first plate having first teeth defining first valleys between said first teeth, each of said first valleys having a width larger than the width of said substrates, and
a second plate having second teeth defining second valleys between said second teeth, each of said second valleys having a width larger than the width of said substrates,
said first and second valleys are staggered with respect to each other, and are adapted so that each substrate is supported only by one of said first teeth and a corresponding one of said second teeth.

### Claim 7 (depends on 6)

The substrate holder of claim 6, wherein said first teeth have
first straight portions defining walls of said first valleys and adapted for contacting said first major surfaces of said substrates, and said second teeth have
second straight portions defining walls of said second valleys and adapted for contacting said second major surfaces of said substrates.

### Claim 8 (depends on 7)

The substrate holder of claim 7, wherein said first teeth further have
first slope portions provided on said first straight portions and adapted for defining first clearances from said substrates, and said second teeth further have
second slope portions provided on said first straight portions and adapted for defining second clearances from said substrates.

### Claim 9 (depends on 7)

The substrate holder of claim 7, wherein
said first straight portions have first bevels to define first surfaces adapted for contacting said first major surfaces of said substrates, and
said second straight portions have second bevels to define second surfaces adapted for contacting said second major surfaces of said substrates.

### Claim 10 (depends on 7)

The substrate holder of claim 7, wherein
said first straight portions have first projections adapted for contacting said first major surfaces of said substrates, and
said second straight portions have second projections contacting said second major surfaces of said substrates.

### Claim 11 (depends on 6)

The substrate holder of claim 6, wherein
said first teeth partially overlap said second teeth,
said first teeth have first top slopes inclined to a first direction, and
said second teeth have second top slopes inclined to a second direction, and
said first top slopes and said second top slopes are adapted to support said substrates at edge points of said substrates.

### Claim 12 (depends on 4)

The substrate holder of claim 4, wherein
said first plate is movable relative with respect to said second plate in a direction along each bridge.

### Claim 13 (depends on 4)

The substrate holder of claim 4, wherein
through holes are formed in said first and second plates.

### Claim 14 (depends on 1)

The substrate holder of claim 1, wherein said bridges are disposed in said substrate holder so as to be capable of holding substrates in a vertically upright position.

### Claim 15 (depends on 1)

The substrate holder of claim 1, wherein said valleys are generally V-shaped.

### Claim 16 (depends on 1)

The substrate holder of claim 1, wherein said valleys are generally Y-shaped.

### Claim 17 (depends on 3)

The substrate holder of claim 3, wherein said projections are capable of contacting said substrates substantially at points.

### Claim 18 (depends on 3)

The substrate holder of claim 3, wherein said valleys are generally Y-shaped, said projections are provided on straight portions of said walls, and top surfaces of said projections are aligned with surfaces of slope portions of said walls.