# US 5,704,220 A · Testing equipment having refrigerator incorporated therein

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- Number: US 5,704,220 A
- Document ID: US5704220A
- Status: Granted
- Kind: A
- Application number: 08/728,950
- Filed: 1996-10-11
- Granted: 1998-01-06
- Earliest claimed: 1996-02-27
- Assignees: Nagase Sangyo Kabushiki Kaisha
- Inventors: Hiroshi Yamazaki
- Web page: https://patentgrep.com/patent/US5704220A

## CPC

- G01R 31/2875: {related to heating}
- F25D 19/006: {Thermal coupling structure or interface}
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)
- F25D: REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR (refrigerated showcases A47F3/04; thermally-insulated vessels for domestic use A47J41/00; refrigerated vehicles, see the appropriate subclasses of classes B60 - B64; containers with thermal insulation in general B65D81/38; heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants, or materials for the production of heat or cold by chemical reactions other than by combustion C09K5/00; thermally-insulated vessels for liquefied or solidified gases F17C; air-conditioning or air-humidification F24F; refrigeration machines, plants, or systems F25B; cooling of instruments or comparable apparatus without refrigeration G12B)

## Abstract

A testing equipment having a refrigerator incorporated therein which is capable of accomplishing a test for electrical characteristics of a tested object under stable circumstances substantially free from any vibration. A refrigerator and a counter balance put on a floor are connected together through a rigid structure of increased strength, to thereby minimize vibration of the refrigerator. Vibration-proof pads are arranged between the counter balance and the floor. Also, Rubber dampers are arranged between a frame and an upper wall plate. Further, vibration-proof pads are arranged between the frame and the floor. Such arrangement of the pads and dampers substantially prevents transmission of vibration of the refrigerator to both a prober actuation unit and a tested object holder.

## Claims

### Claim 1

A testing equipment having a refrigerator incorporated therein, comprising:
a support formed with a mounting hole and arranged on an installation plane;
a chamber structure arranged on said support;
a testing prober including a probe inserted into said chamber structure;
an actuation unit for actuating said testing prober;
a tested object holder arranged in said chamber structure;
a refrigerator having a cooling head fixedly mounted thereon and arranged so as to be accessible to an interior of said chamber structure through said mounting hole of said support;
said cooling head being connected to said tested object holder through a heat transfer medium, so that a tested object held on said tested object holder may be cooled through said tested object holder when it is subject to testing by said testing prober;
a counter weight arranged on said installation plane and connected to said refrigerator; and
vibration-proof means arranged between said support and said installation plane and between said counter weight and said installation plane, respectively.

### Claim 2 (depends on 1)

A testing equipment as defined in claim 1, further comprising a plurality of plate members arranged at a boundary between a lower surface of said refrigerator and an upper surface of said counter weight so as to constitute a rigid structure of a substantially triangular shape, resulting in being joined to said refrigerator and counter weight;
said refrigerator and counter weight being connected to each other through said plate members.

### Claim 3 (depends on 1)

A testing equipment as defined in claim 1, wherein said support includes a frame supported on said installation plane and an upper wall plate supported on an upper surface of said frame through a vibration-proof means.

### Claim 4 (depends on 1)

A testing equipment as defined in any one of claim 1, further comprising a vacuum source for evacuating the interior of said chamber structure to a predetermined degree of vacuum;
said vacuum source being arranged so as to communicate with said chamber structure directly or through a communication pipe; and
a vibration removing means arranged at one of a connection between said vacuum source and said chamber structure and a connection between said communication pipe and said chamber structure.

### Claim 5 (depends on 1)

A testing equipment as defined in any one of claim 1, wherein said heat transfer medium is selected from the group consisting of a copper wire and a wire mesh member formed of a copper wire.

### Claim 6 (depends on 1)

A testing equipment as defined in any one of claim 1, further comprising a cover connected at an upper end thereof to said chamber structure and arranged so as to surround an outer periphery of said refrigerator;
said cover being divided into an upper cover section and a lower cover section; and
a bellows interposedly arranged between said upper cover section and said lower cover section.