# US 5,703,890 A · Microlaser cavity, a solid state pulsed microlaser with active Q-switching by a micromodulator and method forming same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,703,890 A - Document ID: US5703890A - Status: Granted - Kind: A - Application number: 08/663,664 - Filed: 1996-06-14 - Granted: 1997-12-30 - Earliest claimed: 1995-06-27 - Assignees: Commissariat a l'Energie Atomique - Inventors: Philippe Thony; Marc Rabarot; Engin Molva - Web page: https://patentgrep.com/patent/US5703890A ## CPC - H01S 3/0627: {the resonator being monolithic, e.g. microlaser} - H01S 3/121: using intracavity mechanical devices - H01S 3/0602: {Crystal lasers or glass lasers (H01S3/063 takes precedence)} - H01S 3/0615: {Shape of end-face} - H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL ## Abstract The invention relates to a microlaser cavity, with active Q switching, characterized in that it comprises: an active laser medium (20), an input mirror (22) and an output mirror (24, 87) defining the cavity, a micromodulator with frustrated total internal reflection, comprising two microprisms (32, 34) made of a certain material of index n.sub.1 each having at least one planar face (36, 38), the two planar faces being approximately parallel to each other and inclined on the microlaser cavity axis, thereby defining a plate (30) of a certain material of index n.sub.2 less than n.sub.1. means (44, 46, 48, 50, 52, 54) for varying the thickness of the plate. ## Claims ### Claim 1 A microlaser cavity with active Q switching comprising: an active laser medium, an input mirror and an output mirror defining the cavity, a micromodulator with frustrated total internal reflection, comprising two microprisms made of a certain material of index n.sub.1 each having at least one planar face, the two planar faces being approximately parallel to each other and inclined onto the microlaser cavity axis, thereby defining a plate of a certain material of index n.sub.2 less than n.sub.1, means for varying the thickness of the plate. ### Claim 2 (depends on 1) A microlaser cavity according to claim 1, the means for varying the thickness of the plate being essentially situated between the two microprisms. ### Claim 3 (depends on 1, 2) A microlaser cavity according to one of claims 1 or 2, the two faces which are approximately parallel to each other and inclined on the laser axis being each extended on both sides by two planar faces positioned approximately perpendicular to the microlaser cavity axis. ### Claim 4 (depends on 1, 2) A microlaser cavity according to one of claims 1 or 2, the means for varying the thickness of the plate being piezoelectric means. ### Claim 5 (depends on 4) A microlaser cavity according to claim 4, the piezoelectric means comprising at least one piezoelectric crystal essentially situated in the gap between the two prisms. ### Claim 6 (depends on 5) A microlaser cavity according to claim 5, the polarization electrodes of the piezoelectric crystal being positioned on either side of this crystal, each of these electrodes being situated on a face or on the surface of one of the two prisms. ### Claim 7 (depends on 4) A microlaser cavity according to claim 4, the piezoelectric material having a high coefficient of piezoelectric tensor d.sub.15. ### Claim 8 (depends on 1, 2) A microlaser cavity according to one of claims 1 or 2, the means for varying the thickness of the plate being electrostatic means. ### Claim 9 (depends on 8) A microlaser cavity according to claim 8, the two prisms being connected through at least one fixed point, the electrostatic means comprising two electrodes, each being positioned on a face or on the surface of one of the two prisms. ### Claim 10 (depends on 9) A microlaser cavity according to claim 9, one of the two prisms being fitted with a microbeam on a part of which one of the electrodes is at least partially deposited. ### Claim 11 (depends on 1, 2) A microlaser cavity according to one of claims 1 or 2, the cavity being stabilized. ### Claim 12 (depends on 1, 2) A microlaser cavity according to one of claims 1 or 2, the output mirror of the cavity being a maximum reflection mirror, a polished face being additionally provided, on the sides of the microlaser for the output of the laser beam. ### Claim 13 (depends on 1, 2) A microlaser cavity according to one of claims 1 or 2, the micromodulator being deposited directly on the active laser medium. ### Claim 14 (depends on 1, 2) A microlaser comprising a microlaser cavity according to one of claims 1 or 2, and cavity optical pumping means. ### Claim 15 A method of manufacturing a microlaser cavity with active Q switching comprising: a step of forming, on an active laser medium, a micromodulator with frustrated total internal reflection, a step of forming means to vary the thickness of the plate, a step of forming the input and output mirrors of the cavity. ### Claim 16 (depends on 15) A method according to claim 15, the formation of the micromodulator comprising the forming of a first microprism made of a material of index n.sub.1, then the forming of a second microprism also made of a material of index n.sub.1, each having at least one planar face, the two faces being approximately parallel to each other and inclined on the microlaser cavity axis. ### Claim 17 (depends on 16) A method according to claim 16, comprising, in addition, the forming on both sides of each planar face, of two other planar faces, positioned substantially perpendicular to the microlaser axis. ### Claim 18 (depends on 16, 17) A method according to one of claims 16 or 17, the step of forming the means for varying the thickness of the plate occurring after the forming of the first microprisms and before the forming of the second microprism. ### Claim 19 (depends on 16, 17, 18) A method according to one of claims 16 to 18, also comprising a step of depositing a core material between the two microprisms. ### Claim 20 (depends on 15, 16, 17, 18) A method according to one of claims 15 to 18, comprising, in addition, a step of producing means for optically stabilizing the cavity.