Lens scatterometer system employing source light beam scanning means
AssigneeBio-Rad Laboratories, Inc.
InventorsJohn R. McNeil, S. Sohail H. Naqvi, Scott R. Wilson
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Abstract
An optical scatterometer system enables illumination of a sample material at various angles of incidence without rotating or otherwise moving the sample material.
Claims30
An optical scatterometer system for characterizing the diffraction properties of a sample material by varying the angle of incidence of a light beam from a source without moving the sample material, the optical scatterometer comprising:
- light source means for transmitting one or more source light beams;
- a beam splitter positioned to direct the one or more source light beams diffracted by the sample material;
- a lens positioned such that the sample material is located in a back focal plane of the lens, the lens being further positioned to receive the one or more source light beams directed by the beam splitter, to transmit the one or more source light beams to illuminate the sample material, to receive the one or more light beams diffracted by the sample material, and to transmit the one or more light beams diffracted by the sample material to the beam splitter;
- one or more detection systems positioned to receive and characterize the one or more light beams diffracted by the sample material;
- and
- beam direction means positioned between the light source means and the beam splitter for scanning the one or more source light beams along a line in an entrance aperture of the lens to thereby direct the one or more source light beams transmitted by the light source means to selected different points along said line in the entrance aperture of the lens.
An optical scatterometer system for characterizing the diffraction properties of a sample material by varying the angle of incidence of a light beam from a source without moving the sample material, the optical scatterometer comprising:
- light source means for transmitting a source light beam having a desired cross-sectional pattern;
- a beam splitter positioned to direct the source light beam toward the sample material and to direct one or more light beams diffracted by the sample material;
- a lens positioned such that the sample material is located in a back focal plane of the lens, the lens being further positioned to receive the source light beam directed by the beam splitter such that the source light beam simultaneously illuminates all points in said pattern in an entrance aperture of the lens and such that a maximum linear dimension of the illuminated pattern comprises a substantial portion of a diameter of said entrance aperture, to transmit the source light beam to illuminate the sample material, to receive the one or more light beams diffracted by the sample material, and to transmit the one or more light beams diffracted by the sample material.
An optical scatteromter system for characterizing the diffraction properties of a sample material by varying the angle of incidence of a light beam from a source without moving the sample material, the optical scatterometer comprising:
- light source means for transmitting a plurality of source light beams;
- a beam splitter positioned to direct the plurality of source light beams toward the sample material and to direct one or more light beams diffracted by the sample material;
- a lens positioned such that the sample material is located in a back focal plane of the lens, the lens being further positioned to receive the plurality of source light beams directed by the beam splitter, to transmit the plurality of source light beams to illuminate the sample material, to receive the one or more light beams diffracted by the sample material, and to transmit the one or more light beams diffracted by the sample material to the beam splitter;
- and
- one or more detection systems positioned to receive and characterize the one or more light beams diffracted by the sample material;
- said light source means being operative for directing the plurality of source light beams to selected different points of an entrance aperture of the lens to thereby illuminate the sample material at multiple angles of incidence.
Dependencies are inferred from the claim text.