# US 5,703,494 A · Probing test apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,703,494 A - Document ID: US5703494A - Status: Granted - Kind: A - Application number: 08/553,013 - Filed: 1995-11-03 - Granted: 1997-12-30 - Earliest claimed: 1994-11-09 - Assignees: Tokyo Electron Limited - Inventors: Kunio Sano - Web page: https://patentgrep.com/patent/US5703494A ## CPC - G01R 1/06705: {Apparatus for holding or moving single probes (for moving multiple probe heads or ICs under test G01R31/2886)} - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) ## Abstract A probing test apparatus comprising a probe card having a plurality of probes and first terminals contacted with and electrically connected to conductive pads of a circuit, a test head having a signal transmitting circuit through which the test signal is transmitted to the probes, a performance board having second terminals electrically connected to the signal transmitting circuit, a contact ring interposed between the performance board and the probe card and whose impedance has been adjusted, a plurality of first-type pogopins each having a pair of pin members contacting the first and second terminals to transmit the test signal to the probes, and a plurality of second-type pogopins each having a pair of pin members contacting the first and second terminals, the second-type pogopins being arranged in the contact ring, surrounding each first-type pogopin in a plane perpendicular to the axes of the pin members, and electrically connected to the first terminal grounded. ## Claims ### Claim 1 A probing test apparatus for testing electric properties of a circuit while sending a test signal to the circuit to be tested, comprising: a probe card having a plurality of probes and first terminals to be contacted with and to be electrically connected to conductive pads of the circuit to be tested; a test head having a signal transmitting circuit through which the test signal is transmitted to each of the probes; a performance board having second terminals electrically connected to said signal transmitting circuit of the test head; a contact ring interposed between the performance board and the probe card and whose impedance has been adjusted; a plurality of first-type pogopins each having a pair of pin members contacting the first and second terminals to transmit the test signal to each of the probes said first-type pogopins being arranged in the contact ring; and a plurality of second-type pogopins each having a pair of pin members contacting the first and second terminals, said second-type pogopins being arranged in the contact ring, and spaced from said first-type pogopins in a plane perpendicular to the axes of said pin members, said second-type pogopins electrically grounded, wherein an interval L.sub.1 in the plane between each of the first-type pogopins and some of the second-type pogopins which are the nearest to said each of the first-type pogopins is smaller than an interval L.sub.2 in the plane between said each of the first-type pogopins and an adjacent first-type pogopin which is the nearest to said each of the first-type pogopins, and wherein for each one of said first-type pogopins the closest pogopins thereto in said plane are all second-type pogopins such that said one of said first-type pogopins is surrounded by said second type pogopins. ### Claim 2 (depends on 1) The probing test apparatus according to claim 1, wherein a ratio L.sub.1 /L.sub.2 of an interval L.sub.2 relative to an interval L.sub.1 is smaller than one, said interval L.sub.1 is a distance between each of the first-type pogopins and some of the second-type pogopins, which are nearest to said each of the first-type pogopins, and said interval L.sub.2 is a distance between the first-type pogopin and some of the other first-type pogopins, which are nearest to said each of the first-type pogopins. ### Claim 3 (depends on 1) The probing test apparatus according to claim 1, wherein, as compared with each of the first-type pogopins which is the nearest to an adjacent first-type pogopin, each of the second-type pogopins is positioned nearer to said adjacent first-type pogopin. ### Claim 4 (depends on 1) The probing test apparatus according to claim 1, wherein, as compared with each of the second-type pogopins which is the nearest to an adjacent first-type pogopin, each of the first-type pogopins is positioned remote from said adjacent first-type pogopin. ### Claim 5 (depends on 1) The probing test apparatus according to claim 1, wherein each of the first-type pogopins is positioned in a center of a polygonal block which is formed four or more said second-type pogopins in the plane. ### Claim 6 (depends on 5) The probing test apparatus according to claim 5, wherein all of the second-type pogopins which form the polygonal block serve as a part to form an adjacent polygonal block. ### Claim 7 (depends on 5) The probing test apparatus according to claim 5, wherein a part of the second-type pogopins which form the polygonal block serves as a part to form an adjacent polygonal block. ### Claim 8 (depends on 1) The probing test apparatus according to claim 1, wherein each of the first-type pogopins is positioned in a center of a square block which is formed by four said second-type pogopins in the plane. ### Claim 9 (depends on 1) The probing test apparatus according to claim 1, wherein each of the first-type pogopins is positioned in a center of a regular hexagon block which is formed by six said second-type pogopins in the plane. ### Claim 10 (depends on 1) The probing test apparatus according to claim 1, wherein each of the first-type pogopins is positioned in a center of a regular octagon block which is formed by eight said second-type pogopins in the plane. ### Claim 11 (depends on 1) The probing test apparatus according to claim 1, wherein the test head sends to the each probe through the first-type pogopin the test signal which has a frequency of a range of several 10s MHz to several 100s.