# US 5,703,485 A · Method and test structure for determining magnetic domain switching field when fabricating patterned exchange biased magnetoresistive (MR) head > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,703,485 A - Document ID: US5703485A - Status: Granted - Kind: A - Application number: 08/687,903 - Filed: 1996-07-29 - Granted: 1997-12-30 - Earliest claimed: 1996-07-29 - Assignees: Headway Technologies, Inc. - Inventors: Yimin Guo; Kochan Ju; Yimin Hsu - Web page: https://patentgrep.com/patent/US5703485A ## CPC - G11B 5/3932: {Magnetic biasing films} - B82Y 25/00: Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance - G01R 33/093: {using multilayer structures, e.g. giant magnetoresistance sensors (thin magnetic films H01F10/00)} - G11B 5/3166: {Testing or indicating in relation thereto, e.g. before the fabrication is completed} - G11B: INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER (recording measured values in a way that does not require playback through a transducer G01D9/00; recording or playback apparatus using mechanically marked tape, e.g. punched paper tape, or using unit records, e.g. punched or magnetically marked cards G06K; transferring data from one type of record carrier to another G06K1/18; circuits for coupling output of reproducer to radio receiver H04B1/20; gramophone pick-ups or like acoustic electromechanical transducers or circuits therefor H04R) - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) ## Abstract A method for determining through a test structure a longitudinal magnetic exchange field within a patterned exchange biased magnetoresistive (MR) sensor element. To practice the method, there is first provided a substrate. Formed upon the substrate is a patterned magnetoresistive (MR) layer which has a projected length upon the substrate and a projected width upon the substrate. There is formed at a pair of separated locations over the patterned magnetoresistive (MR) layer a pair of patterned conductor lead layers. The pair of patterned conductor lead layers is separated by a track width of the patterned magnetoresistive (MR) layer, where the track width is smaller than the projected width. There is also formed within the track width and upon the patterned magnetoresistive (MR) layer a minimum of one patterned anti-ferromagnetic layer separated from each patterned conductor lead layer within the pair of patterned conductor lead layers by a minimum of one unpinned width of the patterned magnetoresistive (MR) layer. The patterned magnetoresistive (MR) layer also has a minimum of one pinned width of the patterned magnetoresistive (MR) layer beneath the minimum of one patterned anti-ferromagnetic layer. The projected length, the unpinned width and the pinned width of the patterned magnetoresistive (MR) layer are chosen such that the magnetic domains within the unpinned width and the pinned width are coupled such that they switch jointly in an externally applied magnetic field. Finally, there is measured through the patterned conductor lead layers a resistance change within the patterned magnetoresistive (MR) layer when the patterned magnetoresistive (MR) layer is exposed to the externally applied magnetic field. The invention also contemplates the test structure through which the method of the invention is practiced. ## Claims ### Claim 1 A method for determining a magnetic domain switching field comprising: providing a substrate; forming upon the substrate a patterned magnetoresistive (MR) layer, the patterned magnetoresistive (MR) layer having a projected length of the patterned magnetoresistive (MR) layer upon the substrate and a projected width of the patterned magnetoresistive (MR) layer upon the substrate; forming at a pair of separated locations over the patterned magnetoresistive (MR) layer a pair of patterned conductor lead layers, the pair of patterned conductor lead layers defining a track width of the patterned magnetoresistive (MR) layer, the track width of the patterned magnetoresistive (MR) layer being smaller than the projected width of the patterned magnetoresistive (MR) layer; forming upon the track width of the patterned magnetoresistive (MR) layer a minimum of one patterned anti-ferromagnetic layer separated from each patterned conductor lead layer within the pair of patterned conductor lead layers by a minimum of one unpinned width of the patterned magnetoresistive (MR) layer, the patterned magnetoresistive (MR) layer also having a minimum of one pinned width of the patterned magnetoresistive (MR) layer beneath the minimum of one patterned anti-ferromagnetic layer, where the pinned width of the patterned magnetoresistive (MR) layer and the unpinned width of the patterned magnetoresistive (MR) layer each have their magnetic domains ordered in a first direction absent an external magnetic field, and where the projected length of the patterned magnetoresistive (MR) layer, the unpinned width of the patterned magnetoresistive (MR) layer and the pinned width of the patterned magnetoresistive (MR) layer are chosen such that the magnetic domains within the unpinned width of the patterned magnetoresistive (MR) layer and the pinned width of the patterned magnetoresistive (MR) layer are coupled such that they switch jointly in an externally applied magnetic field gradient; exposing the substrate to an externally applied negative magnetic field gradient opposite the first direction of the magnetic domains within the pinned width of the patterned magnetoresistive (MR) layer and the unpinned width of the patterned magnetoresistive (MR) layer while measuring a first resistance change through the pair of patterned conductor lead layers to determine a first magnetic field strength at which the magnetic domains within the pinned width of the patterned magnetoresistive (MR) layer and the unpinned width of the patterned magnetoresistive (MR) layer switch jointly to a second direction opposite the first direction; and exposing the substrate to a positive magnetic field gradient opposite the second direction of the magnetic domains within the pinned width of the patterned magnetoresistive (MR) layer and the unpinned width of the patterned magnetoresistive (MR) layer while measuring a second resistance change through the pair of patterned conductor lead layers to determine a second magnetic field strength at which the magnetic domains within the pinned width of the patterned magnetoresistive (MR) layer and the unpinned width of the patterned magnetoresistive (MR) layer switch jointly to return to the first direction opposite the second direction. ### Claim 2 (depends on 1) The method of claim 1 wherein the patterned magnetoresistive (MR) layer is formed from a Permalloy (nickel-iron 80:20) magnetoresistive (MR) alloy material formed upon the substrate to a thickness of from about 50 to about 1000 angstroms. ### Claim 3 (depends on 1) The method of claim 1 wherein the projected length of the patterned magnetoresistive (MR) layer is from about 1 to about 50 microns and the projected width of the patterned magnetoresistive (MR) layer is from about 3 to about 1000 microns. ### Claim 4 (depends on 1) The method of claim 1 wherein the unpinned width of the patterned magnetoresistive (MR) layer is equal to the pinned width of the patterned magnetoresistive (MR) layer, the unpinned width of the patterned magnetoresistive (MR) layer and the pinned width of the patterned magnetoresistive (MR) layer having a width of from about 0.5 to about 25 microns. ### Claim 5 (depends on 4) The method of claim 4 wherein the unpinned width of the patterned magnetoresistive (MR) layer is from about 5 to about 25 microns and the ratio of the projected length of the patterned magnetoresistive (MR) layer to the unpinned width of the patterned magnetoresistive (MR) layer is greater than about 1.5:1 for measurement of a longitudinal magnetic exchange field of up to about 40 oersteds. ### Claim 6 (depends on 4) The method of claim 4 wherein the unpinned width of the patterned magnetoresistive (MR) layer is from about 0.5 to about 5 microns and the ratio of the projected length of the patterned magnetoresistive (MR) layer to the unpinned width of the patterned magnetoresistive (MR) layer is greater than about 1.5:1 for measurement of a longitudinal magnetic exchange field of from about 40 to about 80 oersteds. ### Claim 7 (depends on 1) The method of claim 1 wherein the patterned magnetoresistive (MR) layer has from about 2 to about 100 patterned anti-ferromagnetic layers formed within the track width of the patterned magnetoresistive (MR) layer. ### Claim 8 (depends on 7) The method of claim 7 wherein the patterned anti-ferromagnetic layers are formed from an iron-manganese 50:50 anti-ferromagnetic material at a thickness of from about 100 to about 1000 angstroms each. ### Claim 9 (depends on 1) The method of claim 1 further comprising forming a patterned conductor layer upon the patterned anti-ferromagnetic layer, the patterned conductor layer being formed simultaneously with and from the same material as the pair of patterned conductor lead layers. ### Claim 10 (depends on 1) The method of claim 1 wherein the patterned magnetoresistive (MR) layer, the pair of patterned conductor lead layers, and the patterned anti-ferromagnetic layer are formed simultaneously with and through methods and materials equivalent to the methods and materials employed in forming a magnetoresistive (MR) sensor element upon the substrate. ### Claim 11 A test structure for determining a magnetic domain switching field comprising: a substrate; a patterned magnetoresistive (MR) layer formed upon the substrate, the patterned magnetoresistive (MR) layer having a projected length of the patterned magnetoresistive (MR) layer upon the substrate and a projected width of the patterned magnetoresistive (MR) layer upon the substrate; a pair of patterned conductor lead layers formed at a pair of separated locations over the patterned magnetoresistive (MR) layer, the pair of patterned conductor lead layers being separated by a track width of the patterned magnetoresistive (MR) layer, the track width of the patterned magnetoresistive (MR) layer being smaller than the projected width of the patterned magnetoresistive (MR) layer; a minimum of one patterned anti-ferromagnetic layer formed upon the track width of the patterned magnetoresistive (MR) layer, the patterned anti-ferromagnetic layer being separated from each patterned conductor lead layer within the pair of patterned conductor lead layers by a minimum of one unpinned width of the patterned magnetoresistive (MR) layer, the patterned magnetoresistive (MR) layer also having a minimum of one pinned width of the patterned magnetoresistive (MR) layer beneath the minimum of one patterned anti-ferromagnetic layer, where the magmetic domains within the the pinned width of the patterned magnetoresistive (MR) layer and the unpinned width of the patterned magnetoresistive (MR) layer are ordered in a first direction in absence of an applied magnetic field, and where the projected length of the patterned magnetoresistive (MR) layer, the unpinned width of the patterned magnetoresistive (MR) layer and the pinned width of the patterned magnetoresistive (MR) layer are chosen such that the magnetic domains within the unpinned width of the patterned magnetoresistive (MR) layer and the pinned width of the patterned magnetoresistive (MR) layer are coupled such that they switch jointly in an externally applied magnetic field gradient. ### Claim 12 (depends on 11) The test structure of claim 11 wherein the patterned magnetoresistive (MR) layer is formed from a Permalloy (ie: nickel-iron 80:20) magnetoresistive (MR) alloy material formed upon the substrate to a thickness of from about 50 to about 1000 angstroms. ### Claim 13 (depends on 11) The test structure of claim 11 wherein the projected length of the patterned magnetoresistive (MR) layer is from about 1 to about 50 microns and the projected width of the patterned magnetoresistive (MR) layer is from about 3 to about 1000 microns. ### Claim 14 (depends on 11) The test structure of claim 11 wherein the unpinned width of the patterned magnetoresistive (MR) layer is equal to the pinned width of the patterned magnetoresistive (MR) layer, the unpinned width of the patterned magnetoresistive (MR) layer and the pinned width of the patterned magnetoresistive (MR) layer having a width of from about 0.5 to about 25 microns. ### Claim 15 (depends on 14) The test structure of claim 14 wherein the unpinned width of the patterned magnetoresistive (MR) layer is from about 5 to about 25 microns and the ratio of the projected length of the patterned magnetoresistive (MR) layer to the unpinned width of the patterned magnetoresistive (MR) layer is greater than about 1.5:1 for measurement of a longitudinal magnetic exchange field of up to about 40 oersteds. ### Claim 16 (depends on 14) The test structure of claim 14 wherein the unpinned width of the patterned magnetoresistive (MR) layer is from about 0.5 to about 5 microns and the ratio of the projected length of the patterned magnetoresistive (MR) layer to the unpinned width of the patterned magnetoresistive (MR) layer is greater than about 1.5:1 for measurement of a longitudinal magnetic exchange field of from about 40 to about 80 oersteds. ### Claim 17 (depends on 11) The test structure of claim 11 wherein the patterned magnetoresistive (MR) layer has from about 2 to about 100 patterned anti-ferromagnetic layers formed within the track width of the patterned magnetoresistive (MR) layer. ### Claim 18 (depends on 17) The test structure of claim 17 wherein the patterned anti-ferromagnetic layers are formed from an iron-manganese (50:50) anti-ferromagnetic material at a thickness of from about 100 to about 1000 angstroms. ### Claim 19 (depends on 11) The test structure of claim 11 further comprising a patterned conductor layer formed upon the patterned anti-ferromagnetic layer, the patterned conductor layer being formed simultaneously with and from the same material as the pair of patterned conductor lead layers. ### Claim 20 (depends on 11) The test structure of claim 11 wherein the patterned magnetoresistive (MR) layer, the pair of patterned conductor lead layers, and the patterned anti-ferromagnetic layer are formed simultaneously with and through methods and materials equivalent to the methods and materials employed in forming a magnetoresistive (MR) sensor element upon the substrate.