# US 5,703,287 A · Measuring element for a flow sensor

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- Number: US 5,703,287 A
- Document ID: US5703287A
- Status: Granted
- Kind: A
- Application number: 08/622,717
- Filed: 1996-03-26
- Granted: 1997-12-30
- Earliest claimed: 1995-03-29
- Assignees: Robert Bosch GmbH
- Inventors: Christoph Treutler; Rolf Benz; Horst Muenzel; Steffen Schmidt; Eckart Reihlen; Andreas Lock
- Web page: https://patentgrep.com/patent/US5703287A

## CPC

- G01F 1/6845: {Micromachined devices}
- G01F 1/692: Thin-film arrangements
- G01F: MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME

## Abstract

In a measuring element for a flow sensor and a method for manufacturing the measuring element, a heater, a temperature sensor, and a printed circuit trace are patterned out of a platinum layer. Furthermore, an interconnection region is used for contacting the measuring chip with bonding wires. An additional metal layer is provided for the interconnection region.

## Claims

### Claim 1

A measuring element for a flow sensor, the measuring element attaching to a bonding wire, comprising:
a membrane;
a platinum layer;
at least one heater arranged on the membrane;
at least one temperature sensor arranged on the membrane, the temperature sensor being patterned out of the platinum layer;
at least one printed circuit trace for contacting the heater and the temperature sensor, the printed circuit trace being patterned out of the platinum layer; and
an interconnection region for attaching to the bonding wire, the interconnection region including a metal layer composed of a metal other than platinum.

### Claim 2 (depends on 1)

The measuring element according to claim 1, further comprising a silicon substrate having an applied membrane layer.

### Claim 3 (depends on 2)

The measuring element according to claim 2, further comprising a passivation layer arranged on the membrane layer.

### Claim 4 (depends on 3)

The measuring element according to claim 3, wherein the membrane layer and the passivation layer include silicon, oxygen and nitrogen.

### Claim 5 (depends on 2)

The measuring element according to claim 2, wherein the metal layer is arranged on the platinum layer.

### Claim 6 (depends on 2)

The measuring element according to claim 2, wherein the metal layer is arranged between the platinum layer and the membrane layer.

### Claim 7 (depends on 1)

The measuring element according to claim 1, wherein the metal layer is arranged on a surface of the measuring element in electrical contact with the printed circuit trace and the platinum layer is removed, in the interconnection region.