# US 5,703,186 A · Mixed polymers

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- Number: US 5,703,186 A
- Document ID: US5703186A
- Status: Granted
- Kind: A
- Application number: 08/717,652
- Filed: 1996-09-23
- Granted: 1997-12-30
- Earliest claimed: 1990-12-20
- Assignees: Siemens Aktiengesellschaft
- Inventors: Recai Sezi; Horst Borndoerfer; Hellmut Ahne; Siegfried Birkle; Eberhard Kuehn; Rainer Leuschner; Eva Rissel; Michael Sebald
- Web page: https://patentgrep.com/patent/US5703186A

## CPC

- G03F 7/265: {Selective reaction with inorganic or organometallic reagents after image-wise exposure, e.g. silylation}
- C08F 220/1804: {C4-(meth)acrylate, e.g. butyl (meth)acrylate, isobutyl (meth)acrylate or tert-butyl (meth)acrylate}
- C08F 222/06: Maleic anhydride
- G03F 7/039: Macromolecular compounds which are photodegradable, e.g. positive electron resists (G03F7/075 takes precedence; macromolecular quinonediazides G03F7/023)
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- C08F: MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS

## Abstract

Premixed polymers which can serve as base polymers for high-resolution resists are structured from 40 to 99 mole % of a tert. butyl ester of an unsaturated carboxylic acid and 1 to 60 mole % of an anhydride of an unsaturated carboxylic acid.

## Claims

### Claim 1

A non-grafted terpolymer characterized by 40 to 99 mole % of a tert. butyl ester of an unsaturated carboxylic acid as a first component, 1 to 60 mole % of an anhydride of an unsaturated carboxylic acid as a second component and an unsaturated aromatic compound as a third component.

### Claim 2 (depends on 1)

The terpolymer according to claim 1 wherein the first component is one of acrylic acid tert. butyl ester, methacrylic acid tert. butyl ester, and vinyl benzoic acid tert. butyl ester.

### Claim 3 (depends on 1)

The terpolymer according to claim 1 wherein the second component is maleic acid anhydride.

### Claim 4 (depends on 2)

The terpolymer according to claim 2 wherein the second component is maleic acid anhydride.

### Claim 5 (depends on 1)

The terpolymer according to claim 1 wherein the third component is one of styrene, .alpha.-methyl styrene and vinyl naphthalene.

### Claim 6 (depends on 2)

The terpolymer according to claim 2 wherein the third component is one of styrene, .alpha.-methyl styrene and vinyl naphthalene.

### Claim 7 (depends on 3)

The terpolymer according to claim 3 wherein the third component is one of styrene, .alpha.-methyl styrene and vinyl naphthalene.

### Claim 8 (depends on 4)

The terpolymer according to claim 4 wherein the third component is one of styrene, .alpha.-methyl styrene and vinyl naphthalene.

### Claim 9

A non-grafted terpolymer characterized by 40 to 99 mole % of methacrylic acid tert. butyl ester or vinyl benzoic acid tert. butyl ester as a first component, 1 to 60 mole % of an anhydride of an unsaturated carboxylic acid as a second component and an unsaturated aromatic compound as a third component.