# US 5,702,764 A · Method for the preparation of pyrolytic boron nitride-clad double-coated article

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 5,702,764 A
- Document ID: US5702764A
- Status: Granted
- Kind: A
- Application number: 08/701,563
- Filed: 1996-08-22
- Granted: 1997-12-30
- Earliest claimed: 1993-12-22
- Assignees: Shin-Etsu Chemical Co., Ltd.
- Inventors: Noboru Kimura; Ryouji Iwai
- Web page: https://patentgrep.com/patent/US5702764A

## CPC

- C23C 16/26: Deposition of carbon only
- C23C 16/342: {Boron nitride}
- H05B 3/14: the material being non-metallic
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL

## Abstract

An improvement is proposed in the method for the preparation of a ceramic heater consisting of a substrate of boron nitride, patterned graphite layer thereon as an electric resistance heater element and an overall cladding layer of pyrolytic boron nitride formed on allover the surface after pattern-wise engraving of the graphite layer and the substrate in order to enhance the stability of the cladding layer against crack formation or exfoliation. The improvement is achieved by limiting the depth of engraving not to exceed 200 .mu.m or chamfering and rounding of the edged and recessed ridge lines formed by engraving so that the cross sectional profile is in a smooth contour having a radius of curvature not smaller than 0.5 mm.

## Claims

### Claim 1

In a method for the preparation of a PBN-clad double-coated article comprising the steps of forming an undercoating layer of graphite on the surface of a substrate of boron nitride having an edged or recessed corner or ridge portion and then forming an overall cladding layer of pyrolytic boron nitride by chemical vapor deposition, the improvement which comprises smoothing the surface of the substrate to have a ruggedness not exceeding 200 .mu.m in the height difference between the top of a protrusion and the bottom of a recess or chamfering and rounding the edged or recessed corner or ridge portion such that the radius of curvature thereof is not smaller than 0.5 mm.

### Claim 2

In a method for the preparation of a ceramic heater which is an integral body consisting of a substrate plate of boron nitride, a line-wise patterned layer of graphite to serve as an electric resistance element formed on the substrate surface and a cladding layer of pyrolytic boron nitride covering allover the substrate surface and the graphite layer comprising the steps of forming a graphite layer on the surface of the substrate plate, mechanically engraving the graphite layer and the substrate plate therebelow in the line-wise pattern of the electric resistance element and forming the cladding layer of pyrolytic boron nitride by chemical vapor deposition, the improvement which comprises the depth of the mechanical engraving not exceeding 200 .mu.m.

### Claim 3

In a method for the preparation of a ceramic heater which is an integral body consisting of a substrate plate of boron nitride, a line-wise patterned layer of graphite to serve as an electric resistance element formed on the substrate surface and a cladding layer of pyrolytic boron nitride covering allover the substrate surface and the graphite layer comprising the steps of forming a graphite layer on the surface of the substrate plate, mechanically engraving the graphite layer and the substrate plate therebelow in the line-wise pattern of the electric resistance element and forming the cladding layer of pyrolytic boron nitride by chemical vapor deposition, the improvement which comprises chamfering and rounding the edged and recessed ridge lines formed by engraving in such a fashion that the cross sectional profile of the line-wise patterned layer is a smooth curve having a radius of curvature not smaller than 0.5 mm.