# US 5,702,573 A · Method and apparatus for improved low pressure collimated magnetron sputter deposition of metal films

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- Number: US 5,702,573 A
- Document ID: US5702573A
- Status: Granted
- Kind: A
- Application number: 08/592,909
- Filed: 1996-01-29
- Granted: 1997-12-30
- Earliest claimed: 1996-01-29
- Assignees: Varian Associates, Inc.
- Inventors: Maximilian Biberger; Dennis Conci
- Web page: https://patentgrep.com/patent/US5702573A

## CPC

- H01J 37/3244: {Gas supply means}
- C23C 14/355: {using electrons, e.g. triode sputtering}
- H01J 37/3408: {Planar magnetron sputtering}
- H01J 37/3447: {Collimators, shutters, apertures}
- H01J 37/3494: {Adaptation to extreme pressure conditions}
- H10P 14/44: Physical vapour deposition [PVD]
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A method and apparatus are provided which increase the collimation of sputter deposited films by increasing the mean free path (MFP) of sputtered atoms so as to reduce redirecting collisions with the buffer gas. This is accomplished by reducing buffer gas pressure while employing mechanisms to maintain or increase plasma electron density so as to sustain the plasma in the absence of normally required gas pressure. A first mechanism used to permit reduced gas pressure is to provide gas flow directly to the immediate region of the plasma discharge rather than to another remote area of the sputter deposition chamber. A second mechanism used to permit reduced gas pressure is to provide an electron emitting source near the plasma discharge to increase the plasma electron density without requiring further ionization of buffer gas atoms. These two mechanisms can be used either alone or together, as desired, in view of the circumstances presented.

## Claims

### Claim 1

A method for depositing a thin film of a metal on a substrate in a magnetron sputter deposition chamber, comprising the steps of:
supplying a collimator assembly between a sputter target comprising the metal to be deposited and the substrate;
supplying a plasma support gas to the chamber through an inlet which causes said plasma support gas to enter the sputter deposition chamber in a region between said collimator assembly and said sputter target;
operating the magnetron sputter deposition chamber at a plasma support gas pressure of less than or equal to about 1.0 millitorr;
applying a negative potential to said sputter target so as to strike a plasma discharge in the magnetron sputter deposition chamber;
rotating a closed-loop balanced magnetron assembly in a first plane about a rotation axis, said magnetron assembly having a plurality of permanent magnetron magnets, each of said magnetron magnets having a N-S polar axis oriented substantially parallel to said first plane, all of said magnetron magnets arranged so that first pole-type thereof is oriented outwardly from said rotation axis;
supplying a ring-shaped bucking magnet assembly at a periphery of said sputter target and about said rotation axis and disposed generally in a second plane parallel to said first plane, said bucking magnet assembly having a plurality of permanent bucking magnets, each of said bucking magnets having a N-S polar axis oriented substantially parallel to said second plane, all of said bucking magnets oriented so that said first pole-type thereof is oriented inwardly toward said rotation axis; and
injecting electrons in the vicinity of and directed toward a plasma forming region adjacent said sputter target and into said plasma discharge.

### Claim 2 (depends on 1)

A method according to claim 1 wherein said injecting step is accomplished by locating an electron field emission probe adjacent to said second plane and biasing said probe so as to emit electrons toward said plasma discharge.

### Claim 3 (depends on 1)

A method according to claim 1 wherein said injecting step is accomplished by locating an electron emission source adjacent to said second plane and biasing said electron emission source so as to emit electrons toward said plasma discharge.

### Claim 4 (depends on 3)

A method according to claim 3 wherein said emission source comprises thoriated tungsten.

### Claim 5

A method for depositing a thin film of a metal on a substrate in a magnetron sputter deposition chamber, comprising the steps of:
supplying a collimator assembly between a sputter target comprising the metal to be deposited and the substrate;
supplying a plasma support gas to the chamber through an inlet which causes said plasma support gas to enter the sputter deposition chamber between said collimator assembly and said sputter target;
operating the magnetron sputter deposition chamber at a plasma support gas pressure of less than or equal to about 1.0 millitorr;
applying a negative potential to said sputter target so as to strike a plasma discharge in the magnetron sputter deposition chamber;
rotating a closed-loop balanced magnetron assembly in a first plane about a rotation axis, said magnetron assembly having a plurality of permanent magnetron magnets, each of said magnetron magnets having a N-S polar axis oriented substantially parallel to said first plane, all of said magnetron magnets arranged so that a first pole-type thereof is oriented outwardly from said rotation axis; and
supplying a ring-shaped bucking magnet assembly at a periphery of said sputter target and about said rotation axis and disposed generally in a second plane parallel to said first plane, said bucking magnet assembly having a plurality of permanent bucking magnets, each of said bucking magnets having a N-S polar axis oriented substantially parallel to said second plane, all of said bucking magnets oriented so that said first pole-type thereof is oriented inwardly toward said rotation axis.

### Claim 6 (depends on 5)

A method according to claim 5 wherein said plasma support gas is Argon.

### Claim 7

A magnetron sputter apparatus comprising:
a gas tight envelope;
a sputter target formed of a metal and disposed generally in a first plane;
first means for electrically biasing said sputter target and striking a plasma discharge about said sputter target;
a wafer chuck;
a closed loop rotating balanced magnetron disposed in a second plane parallel to said first plane and arranged for rotation about a rotation axis, said magnetron including a plurality of permanent magnetron magnets, each of said magnetron magnets having a N-S polar axis oriented substantially parallel to said second plane, all of said magnetron magnets arranged so that a first pole-type thereof is oriented outwardly from said rotation axis;
a ring-shaped bucking magnet assembly located at a periphery of said sputter target and about said rotation axis and disposed generally in a third plane substantially parallel to said first plane, said bucking magnet assembly having a plurality of permanent bucking magnets, each of said bucking magnets having a N-S polar axis oriented substantially parallel to said third plane, all of said bucking magnets oriented so that said first pole type thereof is oriented inwardly toward said rotation axis;
a collimation filter disposed between said sputter target and said wafer chuck; and
means for injecting plasma support gas directly toward said plasma discharge while the magnetron sputter apparatus is in operation wherein said means for injecting plasma support gas is positioned so that said plasma support gas enters the magnetron sputter apparatus in a region located between said collimation filter and said sputter target.

### Claim 8 (depends on 7)

An apparatus according to claim 7 further including means for injecting electrons into said plasma, comprising an electron field emission probe disposed adjacent to said sputter target.

### Claim 9 (depends on 7)

An apparatus according to claim 7 further including means for injecting electrons into said plasma, comprising electron emission source disposed adjacent to said sputter target.

### Claim 10

A magnetron sputter apparatus comprising:
a gas tight envelope;
a sputter target formed of a metal and disposed generally in a first plane;
first means for electrically biasing said sputter target and striking a plasma discharge about said sputter target;
a wafer chuck;
a closed loop rotating balanced magnetron disposed in a second plane parallel to said first plane and arranged for rotation about a rotation axis, said magnetron including a plurality of permanent magnetron magnets, each of said magnetron magnets having a N-S polar axis oriented substantially parallel to said second plane, all of said magnetron magnets arranged so that a first pole-type thereof is oriented outwardly from said rotation axis;
a ring-shaped bucking magnet assembly located at a periphery of said sputter target and about said rotation axis and disposed generally in a third plane substantially parallel to said first plane, said bucking magnet assembly having a plurality of permanent bucking magnets, each of said bucking magnets having a polar axis oriented substantially parallel to said third plane, all of said bucking magnets oriented so that said first pole type thereof is oriented inwardly toward said rotation axis;
a collimation filter disposed between said sputter target and said wafer chuck;
a dark space ring disposed between said sputter target and said wafer chuck, said dark space ring supplied with a source of a plasma support gas and at least one plasma support gas outlet, said outer directed generally toward a central axis of said dark space ring; and
means for injecting plasma support gas directly toward said plasma discharge while the magnetron sputter apparatus is in operation, wherein said means for injecting plasma support gas is positioned so that said plasma support gas enters the magnetron sputter apparatus in a region located between said collimation filter and said sputter target.

### Claim 11

A method for depositing a thin film of a metal on a substrate in a balanced magnetron sputter deposition chamber, comprising the steps of:
supplying a collimator assembly between a sputter target comprising the metal to be deposited and the substrate;
supplying a plasma support gas to the chamber through an inlet which directs said plasma support gas to a region located between said collimator assembly and said sputter target;
operating the magnetron sputter deposition chamber at a plasma support gas pressure of less than or equal to about 1.0 millitorr;
applying a negative potential to said sputter target so as to strike a plasma discharge in the magnetron sputter deposition chamber;
locating a closed-loop balanced magnetron assembly in a first plane about a central axis, said magnetron assembly having a plurality of permanent magnetron magnets, each of said magnetron magnets having a N-S polar axis oriented substantially parallel to said first plane, all of said magnetron magnets arranged so that first pole-type thereof is oriented outwardly from said central axis;
supplying a ring-shaped bucking magnet assembly at a periphery of said sputter target and about said central axis and disposed generally in a second plane parallel to said first plane, said bucking magnet assembly having a plurality of permanent bucking magnets, each of said bucking magnets having a N-S polar axis oriented substantially parallel to said second plane, all of said bucking magnets oriented so that said first pole-type thereof is oriented inwardly toward said central axis; and
injecting electrons in the vicinity of and directed toward a plasma forming region within said region adjacent said sputter target and into said plasma discharge.

### Claim 12 (depends on 11)

A method according to claim 11 wherein said injecting step is accomplished by locating an electron field emission probe adjacent to said second plane and biasing said probe so as to emit electrons toward said plasma discharge.

### Claim 13 (depends on 11)

A method according to claim 11 wherein said injecting step is accomplished by locating an electron emission source adjacent to said second plane and biasing said electron emission source so as to emit electrons toward said plasma discharge.

### Claim 14 (depends on 13)

A method according to claim 13 wherein said emission source comprises thoriated tungsten.

### Claim 15

A method for depositing a thin film of a metal on a substrate in a balanced magnetron sputter deposition chamber, comprising the steps of:
supplying a collimator assembly between a sputter target comprising the metal to be deposited and the substrate;
supplying a plasma support gas to the chamber through an inlet which causes said plasma support gas to enter the sputter deposition chamber and be directed toward a region located between said collimator assembly and said target;
operating the magnetron sputter deposition chamber at a plasma support gas pressure of less than or equal to about 1.0 millitorr;
applying a negative potential to said sputter target so as to strike a plasma discharge in the magnetron sputter deposition chamber;
locating a closed-loop balanced magnetron assembly in a first plane about a central axis, said magnetron assembly having a plurality of permanent magnetron magnets, each of said magnetron magnets having a N-S polar axis oriented substantially parallel to said first plane, all of said magnetron magnets arranged so that a first pole-type thereof is oriented outwardly from said central axis; and
supplying a ring-shaped bucking magnet assembly at a periphery of said sputter target and about said central axis and disposed generally in a second plane parallel to said first plane, said bucking magnet assembly having a plurality of permanent bucking magnets, each of said bucking magnets having a N-S polar axis oriented substantially parallel to said second plane, all of said bucking magnets oriented so that said first pole-type thereof is oriented inwardly toward said central axis.

### Claim 16 (depends on 15)

A method according to claim 15 wherein said plasma support gas is Argon.

### Claim 17

A magnetron sputter apparatus comprising:
a gas tight envelope;
a sputter target formed of a metal and disposed generally in a first plane;
first means for electrically biasing said sputter target and striking a plasma discharge about said sputter target;
a wafer chuck;
a closed loop balanced magnetron disposed in a second plane parallel to said first plane and arranged for rotation about a rotation axis, said magnetron including a plurality of permanent magnetron magnets, each of said magnetron magnets having a N-S polar axis oriented substantially parallel to said second plane, all of said magnetron magnets arranged so that a first pole-type thereof is oriented outwardly from said rotation axis;
a ring-shaped bucking magnet assembly located at a periphery of said sputter target and about said rotation axis and disposed generally in a third plane substantially parallel to said first plane, said bucking magnet assembly having a plurality of permanent bucking magnets, each of said bucking magnets having a polar axis oriented substantially parallel to said third plane, all of said bucking magnets oriented so that said first pole type thereof is oriented inwardly toward said rotation axis;
a collimation filter disposed between said sputter target and said wafer chuck and forming a region between said collimation filter and said sputter target; and
means for injecting plasma support gas directly toward said plasma discharge while the magnetron sputter apparatus is in operation, wherein said means for injecting plasma support gas is arranged so that said plasma support gas enters the magnetron sputter apparatus in said region.

### Claim 18

A magnetron sputter apparatus comprising:
a gas tight envelope;
a sputter target formed of a metal and disposed generally in a first plane;
first means for electrically biasing said sputter target and striking a plasma discharge about said sputter target;
a wafer chuck;
a closed loop balanced magnetron disposed in a second plane parallel to said first plane and arranged for rotation about a rotation axis, said magnetron including a plurality of permanent magnetron magnets, each of said magnetron magnets having a N-S polar axis oriented substantially parallel to said second plane, all of said magnetron magnets arranged so that a first pole-type thereof is oriented outwardly from said rotation axis;
a ring-shaped bucking magnet assembly located at a periphery of said sputter target and about said rotation axis and disposed generally in a third plane substantially parallel to said first plane, said bucking magnet assembly having a plurality of permanent bucking magnets, each of said bucking magnets having a polar axis oriented substantially parallel to said third plane, all of said bucking magnets oriented so that said first pole type thereof is oriented inwardly toward said rotation axis;
a collimation filter disposed between said sputter target and said wafer chuck; and
means for injecting electrons directly toward said plasma discharge disposed in a region isolated from other parts of the gas tight envelope by said filter while the magnetron sputter apparatus is in operation.

### Claim 19 (depends on 18)

An apparatus according to claim 18 wherein said means for injecting electrons comprises an electron field emission probe disposed adjacent to said sputter target.

### Claim 20 (depends on 19)

An apparatus according to claim 19 further comprising means for injecting plasma support gas directly toward said plasma discharge while the magnetron sputter apparatus is in operation.

### Claim 21 (depends on 18)

An apparatus according to claim 18 wherein said means for injecting electrons comprises an electron emission source disposed adjacent to said sputter target.

### Claim 22 (depends on 21)

An apparatus according to claim 21 further comprising means for injecting plasma support gas directly toward said plasma discharge while the magnetron sputter apparatus is in operation.

### Claim 23

A magnetron sputter apparatus comprising:
a gas tight envelope;
a sputter target formed of a metal and disposed generally in a first plane;
first means for electrically biasing said sputter target and striking a plasma discharge about said sputter target;
a wafer chuck;
a closed loop balanced magnetron disposed in a second plane parallel to said first plane and arranged for rotation about a rotation axis, said magnetron including a plurality of permanent magnetron magnets, each of said magnetron magnets having a N-S polar axis oriented substantially parallel to said second plane, all of said magnetron magnets arranged so that a first pole-type thereof is oriented outwardly from said rotation axis;
a ring-shaped bucking magnet assembly located at a periphery of said sputter target and about said rotation axis and disposed generally in a third plane substantially parallel to said first plane, said bucking magnet assembly having a plurality of permanent bucking magnets, each of said bucking magnets having a polar axis oriented substantially parallel to said third plane, all of said bucking magnets oriented so that said first pole type thereof is oriented inwardly toward said rotation axis;
a collimation filter disposed between said sputter target and said wafer chuck;
a dark space ring disposed between said sputter target and said wafer chuck, said dark space ring supplied with a source of a plasma support gas and at least one plasma support gas outlet, said outlet directed generally toward a central axis of said dark space ring; and
means for injecting a plasma support gas directly toward said plasma discharge while the magnetron sputter apparatus is in operation wherein said means for injecting plasma support gas is arranged so that said plasma support gas is directed into the magnetron sputter apparatus in a region bounded on one side by said filter and on the opposite side by said sputter target.