# US 5,702,566 A · Conductive photoresist to mitigate antenna effect

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- Number: US 5,702,566 A
- Document ID: US5702566A
- Status: Granted
- Kind: A
- Application number: 08/629,117
- Filed: 1996-04-08
- Granted: 1997-12-30
- Earliest claimed: 1996-04-08
- Assignees: Industrial Technology Research Institute
- Inventors: Bing-Yue Tsui
- Web page: https://patentgrep.com/patent/US5702566A

## CPC

- H10P 50/71: {using masks for conductive or resistive materials}
- H10P 50/267: {using plasmas}
- H10P 50/268: {of silicon-containing layers}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

During gas plasma etching, trapped charge from the plasma can be concentrated in semiconductor devices through the conductive portions of an integrated circuit, leading to their damage. This is known as the antenna effect. This effect can be mitigated by using a photoresist that is electrically conductive during plasma etching. This has been shown to reduce said charge accumulation and device damage. Said conductive photoresist is employed during integrated circuit processing in the same way as is the standard photoresist of the prior art.

## Claims

### Claim 1

A method for mitigating the antenna effect during plasma etching of an integrated circuit comprising:
using an electrically conductive photoresist to protect portions of said integrated circuit that are not to be removed during said plasma etching.

### Claim 2 (depends on 1)

The method of claim 1 wherein said electrically conductive photoresist further comprises:
an electrically conductive resin;
a solvent; and
optionally, a sensitizer.

### Claim 3 (depends on 2)

The method of claim 2 wherein said electrically conductive resin comprises 3-hexyl-thiophene-3-thiophene-ethanemethacrylate copolymer.

### Claim 4 (depends on 2)

The method of claim 2 wherein said solvent comprises an aceto-nitrile solution of gold chloride.

### Claim 5 (depends on 2)

The method of claim 2 wherein said sensitizer comprises gold chloride.

### Claim 6 (depends on 1)

The method of claim 1 wherein said electrically conductive photoresist has a resistivity that is less than about 10.sup.6 ohm cm.

### Claim 7 (depends on 1)

The method of claim 1 wherein said electrically conductive photoresist is a negative resist.

### Claim 8 (depends on 1)

The method of claim 1 wherein said electrically conductive photoresist is a positive resist.

### Claim 9

A method for forming multilevel interconnections in an integrated circuit comprising:
providing a semiconductor substrate;
forming active and passive devices on and in said substrate;
forming a patterned layer of a first conductive material to act as a first conductive contact to said devices;
depositing an insulating layer over said first layer of conductive material;
forming via holes in said insulating layer;
depositing a second conductive layer over said insulating layer and through said via holes;
applying and then patterning a layer of electrically conductive photo-resist over said second conductive layer;
exposing the integrated circuit to a first gaseous plasma environment thereby removing, from said second conductive layer, material not covered by said layer of electrically conductive photoresist; and
then removing said layer of electrically conductive photoresist by exposing it to a second gaseous plasma environment.

### Claim 10 (depends on 9)

The method of claim 9 wherein said semiconductor is silicon.

### Claim 11 (depends on 9)

The method of claim 9 wherein said first conductive layer comprises polysilicon.

### Claim 12 (depends on 9)

The method of claim 9 wherein said insulating layer is silicon oxide or borophosphosilicate glass.

### Claim 13 (depends on 9)

The method of claim 9 wherein said insulating layer is deposited to a thickness between about 0.2 and 1 microns.

### Claim 14 (depends on 9)

The method of claim 9 wherein said second conductive layer is titanium-titanium nitride or aluminum-silicon-copper.

### Claim 15 (depends on 9)

The method of claim 9 wherein said layer of electrically conductive photoresist is applied by means of spin coating or sputtering.

### Claim 16 (depends on 9)

The method of claim 9 wherein said layer of electrically conductive photoresist has a thickness between about 0.5 and 3 microns.

### Claim 17 (depends on 9)

The method of claim 9 wherein said first gaseous plasma includes boron trichloride, chlorine, and nitrogen at a pressure between about 30 and 200 millitorr excited by the application of between about 350 and 750 watts at a frequency of 13.5 MHz.

### Claim 18 (depends on 9)

The method of claim 9 wherein said second gaseous plasma includes oxygen and argon at a pressure between about 30 and 200 millitorr excited by the application of between about 350 and 700watts at a frequency of 13.5 MHz.