# US 5,702,523 A · Rotating head for crystal pulling systems

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- Number: US 5,702,523 A
- Document ID: US5702523A
- Status: Granted
- Kind: A
- Application number: 08/302,194
- Filed: 1994-08-31
- Granted: 1997-12-30
- Earliest claimed: 1993-08-31
- Assignees: Leybold Aktiengesellschaft
- Inventors: Winfried Schulmann; Franz Thimm; Helmut Kaiser
- Web page: https://patentgrep.com/patent/US5702523A

## CPC

- C30B 15/30: Mechanisms for rotating or moving either the melt or the crystal (flotation methods C30B15/28)
- Y10T 117/10: Apparatus
- Y10T 117/1032: Seed pulling
- Y10T 117/1072: including details of means providing product movement [e.g., shaft guides, servo means]
- C30B: SINGLE-CRYSTAL GROWTH (by using ultra-high pressure, e.g. for the formation of diamonds, B01J3/06); UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL (zone-refining of metals or alloys C22B); PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (casting of metals, casting of other substances by the same processes or devices B22D; working of plastics B29; modifying the physical structure of metals or alloys C21D, C22F); SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (for producing semiconductor devices or parts thereof H10); APPARATUS THEREFOR
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A rotating head (11) for crystal pulling systems (1) according to Czochralski has a reference platform (16) which is able to rotate around a vertical rotation axis (A--A) with a vertical feed-through opening (25) for a pulling cable (13) that can be wound up and a drive assembly (23) for driving a horizontal shaft (22). A winding drum (15) with a helical winding groove (29) for the pulling cable is located on this shaft in a fixed manner so it cannot rotate, but can be moved axially. In order to avoid abrasion and contamination and to accurately guide the cable (13), a helical guiding element (30) with the same pitch as the winding groove is located on the horizontal shaft (22) at a location remote from the vertical rotation axis (A--A). This guiding element is able to rotate with the horizontal shaft. The guiding element works together with a guiding nut (31) in such a way that the part of the cable (13) which faces tangentially away from the winding drum (15) is directly guided in the vertical rotation axis (A--A). Here, the helical guiding element (30) is designed as a guiding groove and the guiding nut (31) cooperates with the guiding groove by means of rotating balls (32).

## Claims

### Claim 1

A rotating head for a crystal pulling apparatus, said head comprising
a reference platform rotatable about a vertical axis, said platform having a feed-through opening concentric to said axis,
a shaft rotatable about a horizontal axis which is fixed relative to said platform, said shaft carrying a drum which is fixed against rotation relative to said shaft but movable axially relative to said shaft, said drum having a helical winding groove for cable means wound on said drum and fed tangentially into said feed-through opening,
a helical guide groove concentric to said horizontal axis and rotatable with said shaft, said helical guide groove having the same pitch as said helical winding groove,
nut means comprising rotating balls engaging said guide groove to cause axial movement of said nut means relative to said guide groove, one of said guide groove and said nut means being fixed against axial movement relative to said horizontal axis, the other of said guide groove and said nut means being axially fixed relative to said drum, whereby,
said drum moves axially along said horizontal axis and said cable means is fed along said vertical axis as said shaft is rotated.

### Claim 2 (depends on 1)

Rotating head as in claim 1 wherein said helical guide groove is on said drum remote from said helical winding groove, said nut means being fixed relative to said reference platform.

### Claim 3 (depends on 1)

Rotating head as in claim 1 wherein said helical guide groove is on said shaft remote from said drum, said nut means being axially fixed relative to said drum but not rotatable about said horizontal axis.

### Claim 4 (depends on 1)

Rotating head as in claim 1 comprising
bore means along a chord of said drum, said bore means communicating with said winding groove,
an end piece received in said bore means and fixed to said cable means, said end piece being of larger diameter than said cable means, and
a housing fixed to said rotatable platform and having an opening which can be aligned with said bore means in said drum.

### Claim 5 (depends on 1)

Rotating head as in claim 1 wherein further comprising a drive assembly for said shaft, said drive assembly being located on said reference platform.