# US 5,701,654 A · Precision fluid head transport

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- Number: US 5,701,654 A
- Document ID: US5701654A
- Status: Granted
- Kind: A
- Application number: 08/627,551
- Filed: 1996-04-04
- Granted: 1997-12-30
- Earliest claimed: 1995-06-07
- Assignees: International Business Machines Corporation
- Inventors: Michael James Canestaro
- Web page: https://patentgrep.com/patent/US5701654A

## CPC

- C23F 1/08: Apparatus, e.g. for photomechanical printing surfaces (photo- mechanical reproduction G03F)
- B08B 3/041: {Cleaning travelling work}
- H05K 3/0085: {Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor (apparatus specially adapted for manufacturing assemblages of electric components, e.g. printed circuit boards, H05K13/00)}
- Y10S 134/902: Semiconductor wafer
- Y10T 29/4984: Retaining clearance for motion between assembled parts
- C23F: NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE (working metal by laser beams B23K26/00; desurfacing by applying flames B23K7/00; working of metal by electro-erosion B23H; producing decorative effects by removing surface material, e.g. by engraving, by etching, B44C1/22; electrolytic etching or polishing C25F); INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- H05K: PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A method of forming a fluid treatment apparatus including providing a first and second sheets each having upper, lower, and side surfaces. A plurality of drive rod passages is formed through the first sheet between the side surfaces and through the upper surface. An inside surface of each drive rod passage is continuous with the upper surface and provides a bearing surface for a drive rod. At least one fluid injection passage and at least one fluid drain passage are formed through the first sheet between the upper and lower surfaces between the drive rod passages. A drive rod is inserted into each drive rod passage. The drive rods are rotatably supported by the bearing surfaces and extend above the upper surface. A plurality of drive rod passages is formed through the second sheet between the side surfaces and through the lower surface. An inside surface of each drive rod passage is continuous with the lower surface of the second sheet and provides a bearing surface for a drive rod. At least one fluid injection passage and at least one fluid drain passage are formed through the second sheet between the upper and lower surfaces between the drive rod passages. A drive rod is inserted in each drive rod passage. The drive rods are rotatably supported by the bearing surfaces and extend below the lower surface. The second sheet is arranged over the first sheet, such that the drive rods of the first and second sheets face each other.

## Claims

### Claim 1

A method of forming a fluid treatment apparatus, said method comprising the following steps:
providing a first sheet of material, said first sheet having an upper surface, lower surface, and two side surfaces interconnecting said upper surface to said lower surface;
forming a plurality of spaced apart drive rod member receiving passages extending through said first sheet from one of said side surfaces to the other of said side surfaces and through said upper surface of said first sheet such that an inside surface of each of said drive rod member receiving passages is continuous with said upper surface of said first sheet and provides a bearing surface for a drive rod member inserted therein;
forming at least one fluid injection passage and at least one fluid drain passage through said first sheet of material from said upper surface to said lower surface between said drive rod member receiving passages;
inserting a drive rod member into each of said drive rod member receiving passages such that said drive rod members are rotatably supported by said bearing surfaces and at least partially extend above said upper surface;
providing a second sheet of material, said second sheet having an upper surface, lower surface, and two side surfaces interconnecting said upper surface to said lower surface;
forming a plurality of spaced apart drive rod member receiving passages extending through said second sheet from one of said side surfaces to the other of said side surfaces and through said lower surface of said second sheet such that an inside surface of each of said drive rod member receiving passages is continuous with said lower surface of said second sheet and provides a bearing surface for a drive rod member inserted therein;
forming at least one fluid injection passage and at least one fluid drain passage through said second sheet of material from said upper surface to said lower surface between said drive rod member receiving passages;
inserting a drive rod member into each of said drive rod member receiving passages such that said drive rod members are rotatably supported by said bearing surfaces and at least partially extend below said lower surface; and
arranging said second sheet over said first sheet, such that said drive rod members of said first sheet and said second sheet face each other.

### Claim 2 (depends on 1)

A method according to claim 1, further comprising providing said first sheet with drive rod members each having a substantially equal diameter to the others and that extend above said upper surface of said first sheet less than one-half of the diameter of said drive rod members.

### Claim 3 (depends on 1)

A method according to claim 1, further comprising providing said second sheet with drive rod members each having a substantially equal diameter to the others and that extend above said lower surface of said second sheet less than one-half of the diameter of said drive rod members.

### Claim 4 (depends on 1)

A method according to claim 1, wherein said first sheet is substantially stationary and said second sheet is moveable.

### Claim 5 (depends on 1)

A method according to claim 1, wherein said drive rod members of said first and second sheets have a smaller diameter than a diameter of said drive rod member receiving passages.

### Claim 6 (depends on 1)

A method according to claim 1, said drive rod members have a diameter about 0.002 inch smaller than said diameter of said drive rod member receiving passages in said first sheet and said second sheet.

### Claim 7 (depends on 1)

A method according to claim 1, wherein said fluid treatment apparatus comprises a plurality of first sheets, second sheets and drive rod member receiving passages and drive rod members, and said first sheets and said second sheets are arranged end to end.

### Claim 8 (depends on 7)

A method according to claim 7, further comprising connecting said second sheets to each other and connecting said first sheets to each other.

### Claim 9 (depends on 7)

A method according to claim 7, further comprising arranging said second sheets in a straight line and arranging said first sheets in a straight line.

### Claim 10 (depends on 1)

A method according to claim 1, further comprising providing sprockets on said drive rod members and connecting a drive mechanism for rotating said drive rod members to said sprockets.

### Claim 11 (depends on 10)

A method according to claim 10, further comprising providing said rod members with a counterclockwise rotating drive mechanism.

### Claim 12 (depends on 1)

A method according to claim 1, further comprising arranging said first sheets and said second sheets such that said drive rod members will be in contact when said fluid treatment apparatus is not in use.

### Claim 13 (depends on 1)

A method according to claim 1, wherein said fluid treatment apparatus includes a first sheet and a second sheet that are about six inches by about twenty-four inches by about one inch.

### Claim 14 (depends on 1)

A method according to claim 1, further comprising forming said drive rod member receiving member passages in said second sheet with axes separated by about four inches and forming said drive rod member receiving member passages in said first sheet with axes separated by about four inches.

### Claim 15 (depends on 1)

A method according to claim 1, wherein said drive rod members are about eight inches long.

### Claim 16 (depends on 1)

A method according to claim 1, further comprising providing said fluid treatment apparatus with drive rod members that are from about 0.125 inch to about 0.375 inch in diameter.

### Claim 17 (depends on 1)

A method according to claim 1, further comprising providing said fluid treatment apparatus with a lubricating apparatus for lubricating said drive rod members.

### Claim 18 (depends on 1)

A method according to claim 1, further comprising providing said fluid treatment apparatus with a plurality of valve members received by said fluid injector passages, wherein when said fluid treatment apparatus is treating a substrate, said substrate moving under said valve causes said valve to open, said valves being in a closed position when said substrate is not in contact with said valve members.

### Claim 19 (depends on 1)

A method according to claim 1, further comprising arranging said first sheet and said second sheet such that said upper surface and said lower surface of said first sheet and said second sheet, respectively, and an upper and a lower surface of a substrate are separated by from about five mils to about thirty mils when the substrate is being treated.

### Claim 20 (depends on 1)

A method according to claim 1, wherein said drive rod member receiving passages are formed in said first sheet such that a distance between longitudinal axes of the drive rod member receiving passages is less than the length of a substrate to be treated by the fluid treatment apparatus.