Integrated infrared microlens and gas molecule getter grating in a vacuum package
AssigneeHE Holdings, Inc.
InventorsMichael Ray, Adam M. Kennedy
Life of this patent
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Abstract
An infrared (IR) microlens array has a plurality of microlenses (12) aligned with respective IR detector array pixels (6) to focus incoming IR radiation onto the pixels (6) to improve the efficiency of IR detection, and a gas molecule getter grating (14) inside a vacuum-sealed Dewar assembly that houses the detector array (4) increases the surface area of the getter (15) to improve the efficiency of removing residual gas molecules from the Dewar assembly.
Claims20
A vacuum-sealed Dewar assembly, comprising:
- a substrate;
- a plurality of infrared (IR) detectors on said substrate;
- and
- an IR window comprising a plurality of microlenses positioned to focus IR radiation transmitting onto respective IR detectors, said IR window being sealed with respect to said substrate to form a substanially vacuum enclosure.
A vacuum-sealed Dewar assembly, comprising:
- a substrate;
- a plurality of infrared (IR) detectors on said substrate;
- and
- an IR window that is sealed with respect to said substrate to form a substantially vacuum enclosure and has a surface portion that is substantially transparent to at least some wavelengths of IR radiation so that said radiation is detectable by said IR detectors, said IR window comprising a plurality of protrusions having surfaces on which a getter material is positioned to chemically react with residual gas molecules in said enclosure to remove said gas molecules.
An infrared (IR) window that is substantially transparent to at least some wavelengths of IR radiation, comprising:
- a first surface;
- a second surface having a portion contoured to form a plurality of microlenses and another portion contoured to form a plurality of grating columns defined by a plurality of recesses;
- and
- a getter material positioned on said grating column portion of said second surface adapted to chemically react with gas molecules to remove said gas molecules.
Dependencies are inferred from the claim text.