# US 5,700,629 A · Developing process > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 5,700,629 A - Document ID: US5700629A - Status: Granted - Kind: A - Application number: 08/650,944 - Filed: 1996-05-20 - Granted: 1997-12-23 - Earliest claimed: 1990-02-19 - Assignees: Hitachi Chemical Company, Ltd. - Inventors: Hajime Kakumaru - Web page: https://patentgrep.com/patent/US5700629A ## CPC - G03F 7/30: Imagewise removal using liquid means - H05K 3/0073: {Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - H05K: PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS ## Abstract A resist pattern good in resolution and image precision can be obtained by a developing process characterized by jetting a gas on a developing surface during development or after development. ## Claims ### Claim 1 A process for developing an image-wise exposed photosensitive material which comprises contacting a surface of the photosensitive material comprising a photo resist in the surface of a printed circuit board or a relief in a printing plate, with a developing solution by immersion or by spraying, while jetting a gas at a pressure of 0.1 to 6 kgf/cm.sup.2 and at the surface of the photosensitive material so as to remove any narrow portions by the development and so as not to dry a developing surface during development of image whereby the image developed has improved resolution with a wall vertical to a substrate. ### Claim 2 (depends on 1) A process according to claim 1, wherein the temperature of gas at the surface of the photosensitive material is 0.degree. C. to 80.degree. C. ### Claim 3 (depends on 1) A process according to claim 1, wherein the developing solution is an alkaline aqueous solution. ### Claim 4 (depends on 1) A process according to claim 1, wherein the gas is air. ### Claim 5 (depends on 1) A process according to claim 1, wherein the temperature of the gas at the surface of the photosensitive material is 0.degree. C. to 80.degree. C.; the pressure of the gas is 0.5 kgf/cm.sup.2 to 4 kgf/cm.sup.2 ; and the developing solution is an alkaline aqueous solution and the gas comprises air. ### Claim 6 (depends on 1) A process according to claim 1, wherein a broadening length at a bottom of an image wall is 3 to 5 .mu.m or less. ### Claim 7 A process for developing an image-wise exposed photosensitive material which comprises a step of spray jetting a developing solution on a surface of the photosensitive material comprising a photo resist in the production of a printed wiring board or a relief in a printing plate, a step of jetting air at a surface of 0.1 to 6 kgf/cm.sup.2 and at the surface of the photosensitive material so as to remove very narrow portions by the development and so as not to dry a developing surface during development of an image and repeating said steps one or more times whereby the image developed has improved resolution with a wall vertical to a substrate. ### Claim 8 (depends on 1) A process according to claim 1, wherein the development is carried out by gas jetting simultaneously with spray jetting of the developing solution, with a minimum developing time of 2 to 5 seconds at a time and two or three times as a total. ### Claim 9 (depends on 1) A process according to claim 1, wherein jetting of the gas is carried out for 1 to 30 seconds as a total. ### Claim 10 (depends on 1) A process according to claim 1, wherein the developing solution is sprayed onto the photosensitive material and the gas comprises helium gas, argon gas, nitrogen gas, carbon dioxide gas or air. ### Claim 11 (depends on 1) A process according to claim 1, wherein in contacting of the surface of the photosensitive material with the developing solution, the developing solution is sprayed onto the surface and the time of jetting the gas is 1-5 seconds. ### Claim 12 A process of developing an image-wise exposed photosensitive material which comprises immersing a surface of the photosensitive material comprising a photo resist in the production of a printed wiring board or a relief in a printing plate, within a developing solution or spraying a surface of the photosensitive material with a developing solution, and jetting a gas at a surface of 0.1 to 6 kgf/cm.sup.2 and at the surface of the photosensitive material so as to remove very narrow portions by the development and so as to not to dry a developing surface during development of an image wherein in a case where the photosensitive material is a negative photosensitive material, non-exposed portions are removed and in a case where the photosensitive material is a positive photosensitive material exposed portions are removed, whereby the image developed has improved resolution with a wall vertical to a substrate. ### Claim 13 (depends on 12) A process according to claim 12, wherein the temperature of the gas at the surface of the photosensitive material is 0.degree. C. to 80.degree. C. ### Claim 14 (depends on 12) A process according to claim 12, wherein the developing solution is an alkaline aqueous solution. ### Claim 15 (depends on 12) A process according to claim 12, wherein the gas is air. ### Claim 16 (depends on 12) A process according to claim 12, wherein the temperature of the gas at the surface of the photosensitive material is 0.degree. C. to 80.degree. C.; the pressure of the gas is 0.5 kgf/cm.sup.2 to 4 kgf/cm.sup.2 ; the developing solution is an alkaline aqueous solution and the gas comprises air. ### Claim 17 (depends on 12) A process according to claim 12, wherein a broadening length at a bottom of an image wall is 3-5 .mu.m. ### Claim 18 (depends on 12) A process according to claim 12, wherein the immersing of the surface or spraying of the surface with the developing solution is effected for a minimum developing time and jetting a gas is effected for a period of from 1-30 seconds.