Method for manufacturing thin film magnetic head
AssigneeTDK Corporation
InventorsFujimi Kimura, Toyoaki Tanaka, Akihiko Dobashi, Takashi Abe
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Abstract
After applying a metal film on a surface of a substrate, the metal film is patterned in such a manner that the surface of the substrate is exposed in a pattern that corresponds to the pattern of the required indented portion. Then, the substrate is immersed in an etchant which etches the substrate selectively to form the indented portion in the surface of the substrate using the metal film as a mask. The method makes it possible to define the depth and the pattern of an indented portion where a magnetic transducer is provided with a high degree of accuracy, to prevent a reduction in pattern accuracy due to re-adhering and to advance industrial productivity.
Claims4
A method for manufacturing a thin film magnetic head with a magnetic transducer or a component thereof on an indented portion provided in one surface of a substrate, the method comprising the steps of:
- applying a metal film to the surface of said substrate;
- patterning said metal film in such a manner that said surface of said substrate will be exposed in a pattern corresponding to a pattern of said indented portion;
- and
- immersing said substrate in an etching solution that etches said substrate selectively to form said indented portion in said surface with said metal film as a mask;
- wherein:
- an internal side surface of said indented portion is a bevelled surface with an inclination of 5.degree. to 90.degree..
Dependencies are inferred from the claim text.