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US 5,700,321 AGranted
Method of feeding a dopant in a continuously charging method
AssigneeKomatsu Electronic Metals Co., Ltd.
InventorKeishi Niikura
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AssigneeKomatsu Electronic Metals Co., Ltd.
InventorKeishi Niikura
Estimating the term…
The object of the present invention affords a method of feeding dopant and a dopant composition used therein for easily preparing single crystals having a desired doping concentration during semiconductor substrate fabrication. In accordance with the present invention, a water solution containing oxides of the dopant is first added to the liquid containing colloidal silica. The colloidal silica can adsorb the oxides of the dopant to form a dopant composition. Around rod-shaped polysilicon, that is polysilicon rod, the dopant composition is discontinuously coated on the periphery of the polysilicon rods spaced at constant intervals and then dried. When the polysilicon rods are melted in an apparatus for manufacturing single crystals by a heater, dopant is protected by the glassed silica without evaporation. Accordingly, the dopant can be provided at a predetermined concentration to sustain the grown single crystals having a doping concentration as required.
A method of feeding a dopant for use with a continuously-charged method, pulling single crystals out from a crucible which contains melted semiconductor material and continuously supplying polysilicon, comprising:
A method of feeding a dopant for use with a continuously-charged method, which makes use of a heater over a crucible to melt polysilicon rods which are then dropped into a melt to feed a raw material, comprising:
Dependencies are inferred from the claim text.