# US 5,700,045 A · Universal QFP tray transfer method

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- Number: US 5,700,045 A
- Document ID: US5700045A
- Status: Granted
- Kind: A
- Application number: 08/677,150
- Filed: 1996-07-09
- Granted: 1997-12-23
- Earliest claimed: 1993-06-15
- Assignees: VLSI Technology, Inc.
- Inventors: David Ganapol; Gary Small
- Web page: https://patentgrep.com/patent/US5700045A

## CPC

- H10P 72/78: using vacuum or suction, e.g. Bernoulli chucks
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

An improved method for transferring a semiconductor carrier tray is disclosed. The method herein provides for transferring a semiconductor carrier tray from a first location to a second location by first positioning a cap member to cover the mouth of at least one cup of a semiconductor carrier tray. The capping member contacts the uppermost surface of the cup wall. A partial vacuum is applied to the capped cup, and atmosphere is evacuated from the capped cup, adhering the semiconductor tray to the capping member. Movement of the capping member causes movement of the carrier tray from a first location to a second location. When the carrier tray has been positioned at its final destination, the vacuum is released causing separation of the carrier tray and the capping member. A vacuum cap apparatus is also disclosed.

## Claims

### Claim 1

A method for transferring a semiconductor carrier tray having individual cups and wells, said semiconductor carrier tray being transferred from a first location to a second location, said method comprising:
(a) positioning a cap member to contact at least one individual cup of a semiconductor carrier tray; wherein said cup includes a base portion, and a plurality of wall portions having upper surfaces, said cap member directly contacting the upper wall surfaces of the individual cup to provide a capped cup;
(b) evacuating atmosphere from the capped cup to provide a partial vacuum within the cup, wherein the partial vacuum within the cup acts to join the cap member and the carrier tray;
(c) moving the cap member and the joined carrier tray to a second location; and
(d) releasing the partial vacuum in the carrier tray cup to separate the carrier tray from the cap member.

### Claim 2 (depends on 1)

A method of claim 1, said method further comprising:
(d) releasing the partial vacuum in the carrier tray cup by increasing the atmospheric pressure within the cup, to separate the carrier tray from the cap member.

### Claim 3 (depends on 1)

A method of claim 1 wherein said evacuating step joins said cap member and said carrier tray at a cup at or near the carrier tray center of gravity.

### Claim 4 (depends on 1)

A method of claim 1 wherein a plurality of cups are capped.

### Claim 5

A method for transferring a semiconductor carrier tray having individual cups and wells, said semiconductor carrier tray being transferred from a first location to a second location, said method comprising:
(a) positioning a cap member to contact the mouth of at least one individual cup of a semiconductor carrier tray, to provide a capped cup;
(b) evacuating atmosphere from the capped cup to provide a partial vacuum within the cup, wherein the partial vacuum within the cup acts to join the cap member and the carrier tray;
(c) moving the cap member and the joined carrier tray to a second location; and
(d) releasing the partial vacuum in the carrier tray cup to separate the carrier tray from the cap member.

### Claim 6 (depends on 5)

A method of claim 5 wherein a plurality of cups are capped.