# US 5,699,951 A · Wire bonder and a bonding tool and bonding arm

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- Number: US 5,699,951 A
- Document ID: US5699951A
- Status: Granted
- Kind: A
- Application number: 08/577,157
- Filed: 1995-12-22
- Granted: 1997-12-23
- Earliest claimed: 1994-12-28
- Assignees: Kaijo Corporation
- Inventors: Hideaki Miyoshi
- Web page: https://patentgrep.com/patent/US5699951A

## CPC

- B23K 20/004: {Wire welding}
- B23K 2101/42: Printed circuits
- H10W 72/07141: {Means for applying energy, e.g. ovens or lasers}
- H10W 72/07521: {Aligning}
- H10W 72/07532: {Compression bonding, e.g. thermocompression bonding}
- H10W 72/07533: {Ultrasonic bonding, e.g. thermosonic bonding}
- H10W 72/536: {the connected ends being ball-shaped}
- H10W 72/5363: {the connected ends being wedge-shaped}
- H10W 72/5449: {not being orthogonal to a side surface of the chip, e.g. fan-out arrangements}
- H10W 72/5522: {comprising gold [Au]}
- H10W 72/5524: {comprising aluminium [Al]}
- H10W 72/932: {Plan-view shape, i.e. in top view}
- Y10T 483/17: including machine tool or component
- B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

The present invention discloses a wire bonder that does not require bonding tool replacement to be performed by an experienced worker, is not bothersome and can be completed in an extremely short time, while also enabling time management of the degree of wear of the bonding tool and so forth to be performed reliably, so as to realize improved work efficiency and yield, as well as being able to demonstrate various other effects. In addition, the present invention also discloses a bonding arm and bonding tool that contribute to the achieving of these effects. The above effects are obtained by adding a tool replacement device that removes a used bonding tool (capillary) installed in a bonding arm and installs a new bonding tool. In addition, the above effects are obtained with respect to the bonding arm and bonding tool by forming a tapered surface that guides their mutual insertion.

## Claims

### Claim 1

A wire bonder comprising:
a positioning device for positioning a bonding tool at a location corresponding to the bonding site of the bonding object by two-dimensionally moving a bonding arm on which said bonding tool is mounted;
an arm driving device for driving said bonding arm to bring said bonding tool close to said bonding site; and
a tool replacement device that maintains a stock of a plurality of new bonding tools, removes said bonding tool mounted on said bonding arm, and installs said new bonding tools.

### Claim 2 (depends on 1)

A wire bonder as set forth in claim 1, further comprising:
a fastening member for fastening said bonding tool to said bonding arm, wherein
said tool replacement device comprises:
a tool holding device, which holds said plurality of new bonding tools, arranged within the range of two-dimensional movement of said bonding arm, in a row in a prescribed direction and mutually parallel with the bonding object in the direction of approach and withdrawal of the bonding tools; and
a fastening member tightening and removal device provided near said tool holding device that performs tightening and removal of said fastening member, contains used bonding tools for said tool holding device and couples new bonding tools to said bonding arm by positioning and operating said bonding arm based on the operation of said positioning device and said arm driving device.

### Claim 3 (depends on 2)

A wire bonder as set forth in claim 2, further comprising a storage device for storing distance data, wherein said distance data represents a distance that the bonding arm moves by operation of said positioning device from a reference position to a position corresponding to each of the contained sites of bonding tools in said tool holding device.

### Claim 4 (depends on 1)

A wire bonder as set forth in claim 1 wherein, when a cumulative time of bonding work of the apparatus reaches a prescribed time after said new bonding tool has been installed in said bonding arm, bonding tool replacement work is performed with said tool replacement device.

### Claim 5 (depends on 2)

A wire bonder as set forth in claim 2 wherein said fastening member tightening and removal device comprises:
a tool for tightening and removing said fastening member by engaging said fastening member;
a tool driving device that operates said tool; and
a movement device that holds said tool and tool driving device and moves said tool between the positions where said tool engages and separates from said fastening member.

### Claim 6 (depends on 1)

A wire bonder as set forth in claim 1 wherein said tool replacement device comprises a tool attachment position setting device that sets the attachment position of said bonding tool with respect to the said bonding arm.

### Claim 7 (depends on 6)

A wire bonder as set forth in claim 6 wherein said tool attachment position setting device comprises a jig, which engages with said bonding arm and bonding tool to set the relative positions of both, and a detection device for detecting that said bonding arm has engaged with said jig.

### Claim 8 (depends on 6)

A wire bonder as set forth in claim 6 wherein said tool attachment position setting device comprises a storage device, said storage device storing distance data that represents a distance that the bonding arm moves by operation of said positioning device from a reference position at which said bonding arm starts to operate by the operation of said arm driving device to a desired position at which said bonding arm approaches said tool replacement device.

### Claim 9 (depends on 1)

A wire bonder as set forth in claim 1 wherein said bonding arm includes an insertion hole in which said bonding tool is inserted, and wherein a tapered surface for guiding insertion of said bonding tool in the insertion hole is formed either in the insertion hole on a tool insertion side of the insertion hole, on the end of an insertion side of said bonding tool, or on both said tool insertion side of the insertion hole and the end of the insertion side of said bonding tool.

### Claim 10 (depends on 2)

A wire bonder as set forth in claim 2 wherein said tool holding device includes an insertion hole in which said bonding tool is inserted, and wherein a tapered surface that guides the insertion of said bonding tool is formed in the insertion hole on a tool insertion side of the insertion hole.

### Claim 11 (depends on 2)

A wire bonder as set forth in claim 2 wherein said fastening member tightening and removal device comprises a fastening force setting device for setting a fastening force at a constant level.

### Claim 12 (depends on 1)

A wire bonder as set forth in claim 1 further comprising an ultrasonic vibrating device that vibrates said bonding tool by transmitting ultrasonic vibrations to said bonding tool through said bonding arm.