# US 5,699,916 A · Integrated circuit wafer container

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- Number: US 5,699,916 A
- Document ID: US5699916A
- Status: Granted
- Kind: A
- Application number: 08/794,600
- Filed: 1997-02-03
- Granted: 1997-12-23
- Earliest claimed: 1997-02-03
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Inventors: Wen-Sheng Liang
- Web page: https://patentgrep.com/patent/US5699916A

## CPC

- H10P 72/1922: {characterised by the construction of the closed carrier}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

An improved container for storing large diameter semiconductor wafers. The container has a body member and an enclosure member that are secured together with complimentary threaded portions. The top of the enclosure member has a circular upstanding flange spaced from a circular upstanding protrusion. Upstanding radially ribs are provided between the flange and protrusion to strengthen the enclosure member and provide a means for engagement with a wrench that will apply a torque force.

## Claims

### Claim 1

An improved integrated circuit wafer container for storing large diameter integrated circuit wafers therein, having an enclosure member and a body member, the body member having a base with spaced longitudinally directed portions adapted to encircle and hold wafers stacked on the base, the enclosure member having a circular shaped top wall and a cylindrical shaped side wall that encompasses and encircles the longitudinally directed portions of the body members, a threaded portion on the lower end of the cylindrical wall that engages with a complimentary threaded portion on the base that selectively secures the enclosure member to the body member, the improvement comprising,
an upwardly extending thick concentric circular flange on said circular shaped top wall adjacent the periphery of said top wall, a central upwardly extending protrusion on the top wall, and a plurality of radially extending ribs between said circular flange and said central protrusion.

### Claim 2 (depends on 1)

The container of claim 1 wherein said central protrusion is circular in shape.

### Claim 3 (depends on 2)

The wafer container of claim 2 wherein the heights of said circular flange, said central protrusion, and said ribs are the same.

### Claim 4 (depends on 2)

The wafer container of claim 2 wherein a plurality of downwardly extending fins are provided on the bottom surface of said protrusion.

### Claim 5 (depends on 4)

The wafer container of claim 4 wherein at least one downwardly extending fin is provided on the bottom surface of said circular flange.

### Claim 6 (depends on 4)

The wafer container of claim 4 wherein said fins on the bottom surface of said protrusion are circular in shape.

### Claim 7 (depends on 1)

The wafer container of claim 1 wherein said circular flange is spaced inwardly from the periphery of said top wall.

### Claim 8 (depends on 2)

The wafer container of claim 2 wherein said protrusion and said flange are hollow.

### Claim 9 (depends on 2)

The wafer container of claim 2 wherein the inside diameter of said base member is 8 inches or greater.