Optical component comprising layers of porous silicon
AssigneeForschungszentrum Julich GmbH
InventorsMichael Gotz Berger, Herbert Munder, Stephan Frohnhoff, Markus Thonissen, Hans Luth
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AssigneeForschungszentrum Julich GmbH
InventorsMichael Gotz Berger, Herbert Munder, Stephan Frohnhoff, Markus Thonissen, Hans Luth
Estimating the term…
The invention relates to an optical component consisting of transparent thin layers of differing thickness and refractive indices. Such optical components are used, for example, as interference filters and mirrors. Optical components made of layers with gradually changing refractive indices are also known as waveguides of anti-reflective coatings. The invention achieves the aim of using, instead of layers of ordinary materials, another material by means of a component in which the layers consist of porous silicon. The special advantages of porous silicon as a coating material arises not only from the ease and economy of manufacture, but also in the facility for obtaining gradual refractive index transitions. It is therefore very easily possible to make waveguides on a silicon chip.
An optical element comprising a plurality of transparent thin layers composed of porous silicon, wherein each said porous silicon layer has a thickness and a refractive index different from each other said layer.
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