Thin film magnetic head and method for producing same

A method for producing a thin-film magnetic head having a two-layered magneto-resistance effect element made up of a first magneto-resistance effect film and a second magneto-resistance effect film layered together, wherein the playback signals are detected by the magneto-resistance effect of the second magneto-resistance effect film, comprising the steps of:

• layering the first magneto-resistance effect film and the second magneto-resistance effect film in this sequence to form a two-layered magneto-resistance effect film, and forming a protective layer on said two-layered magneto-resistance effect film;
• etching said two-layered magneto-resistance effect film and said protective layer to a pre-set shape to form a two-layered magneto-resistance effect element of a pro-set shape having a protective layer formed thereon;
• forming a non-magnetic insulating layer for covering the protective layer and the two-layered magneto-resistance effect element;
• forming a non-magnetic insulating layer for covering said protective layer and said two-layered magneto-resistance effect element;
• coating a resist on said non-magnetic insulating layer and subsequently reducing step differences on the surface of said non-magnetic insulating layer by etchback;
• removing the protective layer on both ends of the two-layered magneto-resistance effect element for exposing said second magneto-resistance effect layer;
• and
• forming a pair of electrodes connected on both ends of the two-layered magneto-resistance effect element to said second magneto-resistance effect film.

A method for producing a thin-film magnetic head having a two-layered magneto-resistance effect element made up of a first magneto-resistance effect film and a second magneto-resistance effect film layered together, wherein the playback signals are detected by the magneto-resistance effect of the second magneto-resistance effect film, comprising the steps of:

• layering the first magneto-resistance effect film and the second magneto-resistance effect film in this sequence to form a two-layered magneto-resistance effect film, and forming a protective layer on said two-layered magneto-resistance effect film;
• etching said two-layered magneto-resistance effect film and said protective layer to a pre-set shape to form a two-layered magneto-resistance effect element of a pre-set shape having a protective layer formed thereon;
• forming a non-magnetic insulating layer for covering the protective layer and the two-layered magneto-resistance effect element;
• polishing the surface of said non-magnetic insulating layer for reducing step differences for reducing the step differences on the surface of said non-magnetic insulating layer;
• removing the protective layer on both ends of said two-layered magneto-resistance effect element by etching for exposing said second magneto-resistance effect film;
• and
• forming a pair of electrodes connected to said second magneto-resistance effect film on both ends of said two-layered magneto-resistance effect element.

A thin-film magnetic head comprising:

• a two-layered magneto-resistance effect element made up of a first magneto-resistance effect film and a second magneto-resistance effect film of substantially the same width as the first magneto-resistance effect film, layered with a non-magnetic insulating film in-between;
• a non-magnetic insulating layer arranged on a lateral side of said two-layered magneto-resistance effect element;
• and
• a pair of electrodes arranged on both ends of the upper surface of said two-layered magneto-resistance effect element and connected to said second magneto-resistance effect film;
• wherein the improvement resides in that
• the playback signal is detected by the magneto-resistance effect of said second magneto-resistance effect film.