Friction vacuum pump with pump sections of different designs
AssigneeLeybold Aktiengesellschaft
InventorsGunter Schutz, Heinrich Englander, Friedrich Karl von Schulz-Hausmann, Hinrich Henning
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Abstract
A friction vacuum pump (1) is provided with pump sections of different designs, of which the pump section on the inlet side consists of turbomolecular pump stages (14, 15) and a further pump section of Siegbahn stages (16, 17) with spiral grooves (19), whereby the active pumping surfaces of the Siegbahn stages are formed by facing surfaces of an annular rotor disc and an annular stator disc (16, 17). To simplify the production of such a pump, it is proposed that the annular stator discs (16) have spiral grooves (19).
Claims31
A friction vacuum pump with pump sections of different designs, comprising:
- a first pump section on an inlet side comprising turbomolecular pump stages;
- a second pump section of Siegbahn stages comprising annular rotor discs and annular stator discs comprising spiral grooves, such that each active pumping surface of the Siegbahn stages is formed by facing surfaces of one of said annular rotor discs and a respective one of said annular stator discs;
- and
- a first annular disc of the Siegbahn stages following the turbomolecular pump stages which carries one of stator blades and rotor blades, and which has a width smaller than widths of remaining annular stator discs and annular rotor discs of said Siegbahn stages.
A pump according to claim 4 wherein said means for allowing an intermediate flow range comprises rotating blades on a side of a rotor and guide blades on a side of a stator, whereby the guide blades form ducts equipped with openings situated toward a forevacuum side of the pump.
A friction vacuum pump with pump sections of different designs, comprising:
- a first pump section on an inlet side comprising turbomolecular pump stages;
- a second pump section of Siegbahn stages comprising annular rotor discs and annular stator discs comprising spiral grooves, such that each active pumping surface of the Siegbahn stages is formed by facing surfaces of one of said annular rotor discs and a respective one of said annular stator discs;
- wherein
- said second pump section of Siegbahn stages is followed by at least one third pump section including means for allowing an intermediate flow range between molecular flow and viscous flow;
- at least one stage of said third pump section is designed according to principles of a Gaede type pump;
- and
- said at least one stage of said third pump section including two radially extending ridges arranged in parallel, a cylindrical rotor section, a ridge groove formed by the radially extending ridges that is equipped with at least one opening, and at least one projection for the formation of at least one barrier slot.
A friction vacuum pump with pump sections of different designs, comprising:
- a first pump section on an inlet side comprising turbomolecular pump stages;
- and
- a second pump section of Siegbahn stages comprising annular rotor discs and annular stator discs comprising spiral grooves,
- such that each active pumping surface of the Siegbahn stages is formed by facing surfaces of respective ones of the annular rotor discs and respective ones of the annular stator discs comprising the spiral grooves,
- wherein at least one of the Siegbahn stages is combined with a Gaede stage, and
- wherein at least one of the annular stator discs forms together with a rotor an inner circular space.
A friction vacuum pump with pump sections of different designs, comprising:
- a first pump section on an inlet side comprising turbomolecular pump stages;
- and
- a second pump section of Siegbahn stages comprising annular rotor discs and annular stator discs comprising spiral grooves,
- such that each active pumping surface of the Siegbahn stages is formed by facing surfaces of one of the annular rotor discs and a respective one of the annular stator discs comprising the spiral grooves,
- wherein at least one of the Siegbahn stages is combined with a Gaede stage thereby forming a combined Gaede/Siegbahn stage,
- wherein at least one of the annular rotor discs in the combined Gaede/Siegbahn stage forms together with a stator an outer circular space, and
- wherein a height of the outer circular space is greater than a thickness of the at least one of the annular rotor discs, such that an outside edge of the at least one of the annular rotor discs extends into the circular space.
A friction vacuum pump with pump sections to of different designs, comprising:
- a first pump section on an inlet side comprising turbomolecular pump stages;
- a second pump section of Siegbahn stages comprising annular rotor discs and annular stator discs comprising spiral grooves,
- such that each active pumping surface of the Siegbahn stages is formed by facing surfaces of one of the annular rotor discs and a respective one of the annular stator discs comprising the spiral grooves;
- a housing,
- a plurality of rods extending in a substantially axial direction within the housing;
- a sleeve-like support supported by the plurality of rods;
- and
- a rotor supported on an inside of the sleeve-like support by means of a bearing.
A friction vacuum pump with pump sections of different designs, comprising:
- a first pump section on an inlet side comprising turbomolecular pump stages;
- a second pump section of Siegbahn stages comprising annular rotor discs and annular stator discs comprising spiral grooves,
- such that each active pumping surface of the Siegbahn stages is formed by facing surfaces of one of the annular rotor discs and a respective one of the annular stator discs,
- wherein a first annular disc of the Siegbahn stages is one of the annular rotor discs,
- the first annular disc having a smaller diameter than others of the annular rotor discs, and
- the first annular disc carrying on its circumference rotor blades that are shorter than rotor blades of the turbomolecular pump stages.
A friction vacuum pump with pump sections of different designs, comprising:
- a first pump section on an inlet side comprising turbomolecular pump stages;
- a second pump section of Siegbahn stages comprising annular rotor discs and annular stator discs comprising spiral grooves,
- such that each respective active pumping surface of the Siegbahn stages is formed by facing surfaces of one of the annular rotor discs and a respective one of the annular stator discs,
- wherein a first annular disc of the Siegbahn stages is one of the annular stator discs,
- the first annular disc having a greater inside diameter than others of the annular stator discs, and
- the first annular disc carrying on its circumference stator blades that are shorter than stator blades of the turbomolecular pump stages.
Dependencies are inferred from the claim text.