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AssigneeKabushiki Kaisha Toshiba
InventorsToshiharu Hayashi, Hiroto Urakata, Hironori Nakamuta, Eiichiro Otsuki, Koji Inamoto
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An ultraviolet range laser comprising a vacuum vessel having an open end portion hermetically sealed with an output mirror glass substrate, which is featured in that the output mirror glass substrate is formed of a glass material which is capable of allowing a laser beam of 337 nm in wavelength to pass therethrough at a transmittance of 80 to 96% as measured when the thickness of the glass substrate is set to 5 mm and whose thermal expansion coefficient falls in the range of 44.times.10.sup.-7 /.degree.C. to 55.times.10.sup.-7 /.degree.C. at a temperature of 0.degree. C. to 300.degree. C., and in that a metallic sealing ring is hermetically attached to the open end portion of vacuum vessel and the hermetical sealing of the open end portion of vacuum vessel with the output mirror glass substrate is achieved by hermetically adhering the output mirror glass substrate onto the metallic sealing ring via a low melting point solder glass interposed therebetween.
An ultraviolet range laser comprising a cylindrical ceramic vacuum vessel, at least one pair of discharge electrodes positioned in said vacuum vessel, a high reflection mirror substrate hermetically bonded onto one open end of said vacuum vessel, an output mirror glass substrate hermetically bonded onto the other open end of said vacuum vessel, a laser medium filled in said vacuum vessel, characterized in that said output mirror glass substrate is formed of a glass material which is capable of allowing a laser beam of 337 nm in wavelength to pass therethrough at a transmittance of 80 to 96% as measured when the thickness of said output mirror glass substrate is set to 5 mm and whose thermal expansion coefficient falls within the range of 44.times.10.sup.-7 /.degree. C. to 55.times.10.sup.-7 /.degree. C. at a temperature of 0.degree. C. to 300.degree.C., and in that a metallic sealing ring is hermetically attached to each of said open ends of vacuum vessel and the hermetical sealing of said open end of vacuum vessel with said output mirror glass substrate is achieved by hermetically adhering said output mirror glass substrate onto said metallic sealing ring via a low melting point solder glass interposed therebetween.
An ultraviolet range laser comprising a cylindrical ceramic vacuum vessel, a pair of discharge electrodes positioned in said vacuum vessel, a high reflection mirror substrate hermetically bonded onto one open end of said vacuum vessel, an output mirror glass substrate hermetically bonded onto the other open end of said vacuum vessel, a laser medium filled in said vacuum vessel characterized in that said output mirror glass substrate is formed of a glass material which is capable of allowing a laser beam of 308 nm in wavelength to pass therethrough at a transmittance of 75 to 92% as measured when the thickness of said output mirror glass substrate is set to 5 mm and whose thermal expansion coefficient falls within the range of 44.times.10.sup.-7 /.degree. C. to 55.times.10.sup.-7 /.degree. C. at a temperature of 0.degree. C. to 300.degree.C., and in that a metallic sealing ring is hermetically attached to each of said open ends of vacuum vessel and the hermetical sealing of said open end of vacuum vessel with said output mirror glass substrate is achieved by hermetically adhering said output mirror glass substrate onto said metallic sealing ring via a low melting point solder glass interposed therebetween.
A method of manufacturing an ultraviolet range laser comprising the steps of:
A method of manufacturing an ultraviolet range laser comprising the steps of:
Dependencies are inferred from the claim text.