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US 5,694,325 AGranted
Semiconductor production system
AssigneeKabushiki Kaisha Toshiba
InventorsEtsuo Fukuda, Masayoshi Tazawa, Kazuyuki Miura, Tomiko Takano, Yuichi Satoguchi, Yuichiro Ozaki
Life of this patent
Estimating the term…
Abstract
A system for automatically producing semiconductor products has a section for preparing a process flow containing a series of processes and process conditions for producing different semiconductor products in different quantities in a production line; a section for simulating the producing of semiconductor products according to the process flow; a section for feeding a result of the simulation back to the process flow preparation section, which optimizes the process flow according to the simulation result; and a section for producing semiconductor products according to the optimized process flow.
Claims28
A system for automatically manufacturing semiconductor products, comprising:
- a plurality of processing equipments respectively for carrying out semiconductor production processes by which said semiconductor products are manufactured in combination;
- a process flow storage unit for storing process flow information in accordance with which said semiconductor products are manufactured;
- a production progress manager connected to said process flow storage unit for determining the progress of said semiconductor production processes in accordance with said process flow information;
- an equipment manager connected to said production progress manager and said processing equipments for controlling said processing equipments in accordance with the progress of said semiconductor production processes as determined by said production progress manager;
- an equipment recipe input unit connected to said production progress manager for receiving an equipment recipe indicative of details of the semiconductor production processes as carried out by said processing equipments;
- and
- a process flow preparation section connected to said equipment recipe input unit and said process flow storage unit for improving the process flow by feedback with reference to said equipment recipe and transferring the process flow information as improved to said process flow storage unit, wherein said process flow information includes a header code representing a group, a segment code representing a segment, and variables and actual values thereof.
4 more elements
A system for automatically manufacturing semiconductor products comprising:
- a plurality of processing equipment respectively for carrying out semiconductor production process by which said semiconductor products are manufactured in combination;
- a process flow storage unit for storing process flow information in accordance with witch said semiconductor products are manufactured;
- a production progress manager connected to said process flow storage unit for determining the progress of said semicoductor production processes accordance with said process flow information;
- an equipment manager connected to said production progress manager and said processing equipments for controlling said processing equipments is accordance with the progress of said semiconductor production processes as determined by said production progress manager;
- an equipment recipe input unit connected to said production progress manager for receiving an equipment recipe indicative of details of the semiconductor production process as carried out by said processing equipments;
- and
- a process flow preparation section connected to said equipment recipe input unit an said process flow storage unit for improving the process flow by feedback with reference to said equipment recipe and transferring the process flow information as improved to said process flow storage unit;
- wherein said production progress manager includes:
- a process flow fetcher for fetching data necessary for carrying out said semiconductor production processes from the process flow storage unit to a main memory;
- a transportation instruction unit for determining necessary transportation between said processing equipments;
- a product status controller for controlling the progress of said semiconductor production processes on a semiconductor product;
- an event data writer for writing temporal data and equipment status data to said process flow storage unit;
- a result writer for writing process conditions to an equipment data storage unit;
- and
- an amendment controller for adding data to, deleting data from, and amending said process flow information stored in said process flow storage unit.
12 more elements
A system for automatically producing semiconductor products, comprising:
- means for preparing a process flow containing a series of processes and process conditions for producing different semiconductor products in different quantities in a production line;
- means for simulating the producing of semiconductor products according to the process flow;
- means for feeding a result of the simulation back to said process flow preparation means, which optimizes the process flow according to the simulation result;
- and
- means for producing semiconductor products according to the optimized process flow;
- the means for preparing the process flow including a code management table for hierarchically managing codes and variables that are used to specify processes and process conditions in a process flow,
- wherein the codes contained in the code management table include a header code representing a group and a segment code representing a segment, and the process flow comprises the header code, the segment code, variables and actual values thereof.
4 more elements
Dependencies are inferred from the claim text.