Apparatus for examining target objects such as LCD panels
AssigneeTokyo Electron Limited
InventorsKiyoshi Takekoshi, Shinji Iino, Itaru Iida
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Abstract
A probe apparatus incorporated into a lighting inspection system for LCD panels, includes a store section, a process section, and a transfer section interposed between them. An examination mechanism having a probe card is arranged in an examination area of the process section. Right and left alignment areas are formed so as to interpose the examination area, and right and left work tables on which the LCD panels are to be loaded, are arranged on the right and left alignment areas, respectively. The movement of the right and left work tables is controlled by a controller, and the LCD panels on the right and left work tables are alternately examined in the examination area by the examination mechanism.
Claims19
An apparatus for examining target objects, comprising:
- an examination mechanism provided within an examination area, for examining the target objects;
- first and second alignment areas between which the examination area is interposed, for aligning the target objects;
- first and second work tables onto which the target objects are to be loaded detachably;
- driving means for moving said first and second work tables within a horizontal plane, said driving means allowing said first work table to move between said first alignment area and said examination area and allowing said second work table to move between said second alignment area and said examination area;
- and
- control means for controlling said driving means such that said first and second work tables are moved in said first and second alignment areas, respectively, to align said target objects on said first and second work tables with a predetermined state corresponding to said examination mechanism, and said target objects on said first and second work tables are alternately examined within the examination area by said examination mechanism;
- wherein said apparatus is a probe apparatus used in a lighting inspection system for LCD panels as said target objects, said examination mechanism includes probe electrodes for supplying an electrical signal to the LCD panels, and said probe apparatus comprises a light source for supplying light to the LCD panels during the lighting inspection.
Dependencies are inferred from the claim text.