Perovskite thin-film ink jet transducer
AssigneeSpectra, Inc.
InventorsEdward R. Moynihan, Paul A. Hoisington, David W. Gailus
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Abstract
In the particular embodiments described in the specification, a thin-film PZT piezoelectric transducer ink jet head includes a dielectric layer with electrodes and a thin film piezoelectric layer having a thickness in the range of 1-25 microns including one or more layers of perovskite-seeded PZT material and a further pattern of electrodes on the surface of the PZT layer along with a silicon substrate containing openings to provide ink chambers in the region of the electrodes. An orifice plate affixed to the substrate encloses the ink.
Claims17
An ink jet head for use in an jet system comprising a substrate having two opposed sides and a plurality of openings extending through the substrate providing ink chambers therein, each ink chamber having a volume, an orifice plate on one of the sides of the substrate containing a plurality of orifices for corresponding ink chambers in the substrate, and a thin-film piezoelectric transducer element on the opposite side of the substrate including a polycrystalline perovskite-seeded PZT piezoelectric film having a thickness range from about 1 micron to about 25 microns and having an electroded electroded portion disposed adjacent to each of the ink chambers for selective actuation of a corresponding portion of the transducer element to vary the volume of the chamber adjacent thereto.
Dependencies are inferred from the claim text.