Piezoelectric/electrostricitve element having ceramic substrate formed essentially of stabilized zirconia
AssigneeNGK Insulators, Ltd.
InventorsYukihisa Takeuchi, Koji Kimura
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Abstract
A piezoelectric/electrostrictive element including a thin ceramic substrate, and a piezoelectric/electrostrictive portion formed on the ceramic substrate by a film forming technique without an adhesive agent, the piezoelectric/electrostrictive portion consisting essentially of a plurality of electrodes and at least one piezoelectric/electrostrictive layer. The ceramic substrate is formed of a material which includes as a major component zirconia having a crystal phase that is stabilized by addition of at least one compound selected from the group consisting of: yttrium oxide, ytterbium oxide, cerium oxide, calcium oxide and magnesium oxide.
Claims35
A piezoelectric/electrostrictive element comprising:
- a thin ceramic substrate;
- and
- a piezoelectric/electrostrictive portion formed on said ceramic substrate by a film forming technique without glass such that the piezoelectric/electrostrictive portion directly contacts said ceramic substrate, said piezoelectric/electrostrictive portion consisting essentially of a plurality of electrodes, and at least one piezoelectric/electrostrictive layer which is heat-treated, wherein said ceramic substrate is formed of a material which includes as a major component zirconia having a crystal phase that is stabilized by addition of at least one compound selected from the group consisting of:
- yttrium oxide, ytterbium oxide, cerium oxide, calcium oxide and magnesium oxide.
A piezoelectric/electrostrictive element comprising:
- a thin ceramic substrate;
- and
- a piezoelectric/electrostrictive portion formed on said ceramic substrate by a film forming technique without glass such that the piezoelectric/electrostrictive portion directly contacts said ceramic substrate, said piezoelectric/electrostrictive portion consisting essentially of a plurality of electrodes, and at least one piezoelectric/electrostrictive layer which is heat-treated, wherein said ceramic substrate is formed of a material which includes as a major component zirconia having a crystal phase that is partially stabilized by addition of at least one compound selected from the group consisting of:
- yttrium oxide, cerium oxide, magnesium oxide and calcium oxide, said crystal phase consisting essentially of one of a tetragonal phase and a combination of at least two kinds of the tetragonal phase, a cubic phase and a monoclinic phase.
A piezoelectric/electrostrictive element comprising:
- a thin ceramic substrate;
- and
- a piezoelectric/electrostrictive portion formed on said ceramic substrate by a film forming technique without glass such that the piezoelectric/electrostrictive portion directly contacts said ceramic substrate, said piezoelectric/electrostrictive portion consisting essentially of a plurality of electrodes, and at least one piezoelectric/electrostrictive layer which is heat-treated, wherein said ceramic substrate is formed of a material which includes as a major component zirconia having a crystal phase that is partially stabilized by addition of at least one compound selected from the group consisting of:
- yttrium oxide, cerium oxide, magnesium oxide and calcium oxide, said crystal phase consisting essentially of one of a tetragonal phase and a combination of at least two kinds of the tetragonal phase, a cubic phase and a monoclinic phase, said ceramic substrate having a surface roughness (Ra) within a range of 0.03-0.9 .mu.m.
Dependencies are inferred from the claim text.