Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film
AssigneesNGK Insulators, Ltd., Seiko Epson Corporation
InventorsYukihisa Takeuchi, Koji Kimura, Masato Komazawa
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Abstract
A piezoelectric/electrostrictive actuator including a ceramic substrate, and at least one piezoelectric/electrostrictive actuator unit formed on at least a portion of at least one surface of the substrate, each piezoelectric/electrostrictive actuator unit having a first electrode film, a piezoelectric/electrostrictive film and a second electrode film which are laminated in the order of description, with the piezoelectric/electrostrictive actuator unit formed on the substrate by heat treatment.
Claims24
A piezoelectric/electrostrictive actuator, formed by a method comprising the following steps:
- providing a sintered non-piezoelectric/non-electrostrictive ceramic substrate;
- forming at least one actuator unit directly on a surface of said sintered non-piezoelectric/non-electrostrictive ceramic substrate, by a method comprising the steps of:
- forming a first electrode film on said surface of said ceramic substrate,
- forming, by a thick-film forming process, a green piezoelectric/electrostrictive ceramic film on said first electrode film, and
- forming a second electrode film on the piezoelectric/electrostrictive ceramic film, and
- sintering at least said green piezoelectric/electrostrictive ceramic film formed on said first electrode film to provide a sintered piezoelectric/electrostrictive ceramic film bonded to the first electrode film without a bonding adhesive.
Dependencies are inferred from the claim text.