US 5,691,549 A · Sidewall strap

Abstract

The present invention is a sidewall connector providing a conductive path linking at least two conductive regions. The sidewall connector has a top portion comprising surface. A conductive member contacts the top portion, connecting the rail to a conductive region or to an external conductor. An etch stop layer located on a conductive region can be used to protect the conductive region during the directional etch to form the sidewall connector. A conductive bridge is then used to link exposed portions of the conductive region and the conductive sidewall rail, the conductive bridge extending across the thickness of the etch stop layer. A "T" connector is formed by the process, starting with a pair of intersecting sidewalls wherein the two sidewalls have top edges at different heights where they intersect. The connector is used to form a strap for a DRAM cell.

Claims18

Dependent claims

A semiconductor structure, comprising:

a first conductive sidewall rail having a first outer surface, said first outer surface extending horizontally to define a rail direction;
a first and a second conductive region adjacent said rail, said second conductive region being displaced in said rail direction from said first conductive region, said second conductive region being electrically connected to said first conductive sidewall rail;
a conductive member contacting said first outer surface, said conductive member connecting said first rail to said first conductive region, said conductive member being distinct from said first conductive region;
and
said first and second conductive regions being electrically connected exclusively through said first conductive sidewall rail.

2 more elements

Dependencies are inferred from the claim text.

Sidewall strap

Life of this patent

Sidewall strap

Life of this patent

Abstract

Claims18