Glass and glass-ceramic bubbles having an aluminum nitride coating
AssigneeMinnesota Mining and Manfacturing Company
InventorKyung H. Moh
Life of this patent
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Abstract
A composite bubbles comprising a silicate glass bubble or a bubble of silicate glass-ceramic having an aluminum nitride coating thereon; and a method of making the same. In another aspect, composite articles (electronic substrate materials) having the composite bubbles therein are disclosed.
Claims28
A composite bubble comprising (a) a bubble of a silicate glass having a softening point of less than 900.degree. C., said bubble having an outer surface, and (b) aluminum nitride coated onto 100% of said outer surface of said bubble.
A composite bubble comprising (a) a bubble of a silicate glass-ceramic, said bubble having an outer surface, and said silicate glass-ceramic comprising at least 2% by weight of silicate glass having a softening point of less than 900.degree. C., and (b) aluminum nitride coated onto 100% of said outer surface of bubble.
A method for making a plurality of composite bubbles, said method comprising the steps of:
- (a) providing a plurality of bubbles, the bubbles being selected from the group consisting of (i) silicate glass bubbles having a softening point up to 900.degree. C., and having an outer surface, (ii) silicate glass-ceramic bubbles comprising at least 2% by weight silicate glass having a softening point up to 900.degree. C., and having an outer surface, and (iii) combinations thereof;
- and
- (b) depositing aluminum nitride on the plurality of bubbles by chemical vapor deposition at a temperature below the softening point of the silicate glass
- to provide a plurality of free flowing composite bubbles, wherein each composite bubble comprises one of said bubbles with aluminum nitride coated onto the outer surface thereof, wherein at least a portion of said silicate glass bubbles or silicate glass-ceramic bubbles have said aluminum nitride coated onto at least 90 percent of the outer surfaces.
A method for making a plurality of composite bubbles, said method comprising the steps of:
- (a) providing a plurality of silicate glass-ceramic bubbles comprising at least 2% by weight silicate glass having a softening point up to 900.degree. C.;
- and
- (b) depositing aluminum nitride on said plurality of bubbles by chemical vapor deposition at a temperature below the softening point of the silicate glass
- to provide a plurality of free flowing composite bubbles, wherein each composite bubble comprises one of said bubbles with aluminum nitride coated onto the outer surface thereof, wherein at least a portion of said silicate glass-ceramic bubbles have said aluminum nitride coated onto at least 90 percent of the outer surfaces.
Dependencies are inferred from the claim text.