Apparatus for plasma treatment of the inside surface of a fuel tank
AssigneeLeybold Aktiengesellschaft
InventorsHeinrich Grunwald, Hermann Kloberdanz, Roland Lacher, Siang-Hong Boll
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Abstract
A treatment chamber (1) evacuable by vacuum pumps (13,13') has a mounting (26,26', . . .) bearing the hollow body (4) in the treatment chamber (1), and a line (9,9') for the admission of a process gas into the treatment chamber (1). A microwave conductor (20,20' . . .) is connected with a generator (19,19' . . .) for igniting a plasma in the area of channels formed by a sheet-metal shroud (2,2') matching the configuration of the hollow body (4). A closure (7,7') is provided through which the filler opening (6, 6') of the hollow body (4) can be closed pressure-tight, and a line (9,9') for the process gas passes through the closure.
Claims8
Apparatus for treating the inside surface of a hollow body having opening means therein, said apparatus comprising
- a vacuum chamber,
- shroud means located in said vacuum chamber and conforming to the shape of a hollow body received therein, said shroud means being provided with channel means which cooperate with said hollow body to form closed conduit means and opening means which align with the opening means of said hollow body,
- closure means for closing the opening means of said shroud gas tight,
- means for introducing a process gas into said hollow body, and
- means for introducing microwaves into said closed conduit means.
Dependencies are inferred from the claim text.