Method of forming crystal
AssigneeCanon Kabushiki Kaisha
InventorHiroyuki Tokunaga
Life of this patent
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Abstract
A crystal is formed by applying crystal forming treatment to a substrate, the surface of the substrate being divided into nonnucleation surface exhibiting a small nucleation density and nucleation surface having a sufficeintly small area to allow crystal growth from a single nucleus and exhibiting a larger nucleation density than the nonnucleation surface and the nonnucleation surface being constituted of the surface of a buffer layer to alleviate generation of stress in the crystal formed.
Claims11
A method for suppressing the generation of defects in a monocrystal which defects tend to form in applying crystal forming treatment to a substrate, comprising:
- (a) minimizing generation of stress during said crystal forming treatment by providing a substrate having a surface which is divided into a nonnucleation surface subject to thermal stress at an interface with a growing monocrystal and a nucleation surface having a sufficiently small area so as to form only a single nucleus from which said monocrystal is grown and having a larger nucleation density than the nucleation density of said nonnucleation surface and said nonnucleation surface being a buffer layer sufficient to minimize the generation of thermal stress during a crystal forming step and having a thickness of at most 500 .ANG., wherein the surface of said buffer layer is constituted of a material having a nucleation density smaller by at least 10.sup.3 /cm.sup.2 than the nucleation density of said nucleation surface;
- (b) forming by vapor deposition a single nucleus on said nucleation surface;
- and
- (c) growing said monocrystal from said single nucleus by vapor deposition whereby said buffer layer causes structural change during the growing of said monocrystal and reduces generation of stress at the interface with said growing monocrystal.
A method for suppressing the generating of defects in a monocrystal, which defects tend to form in applying crystal forming treatment to a body, comprising:
- (a) minimizing generation of stress along said crystal forming treatment by providing a body comprising a support;
- forming a first layer of an amorphous material on the surface of said support;
- and
- forming a second layer subject to thermal stress at an interface with a growing monocrystal on the surface of said first layer thereby exposing an area of said first layer sufficiently small so as to form only a single nucleus from which said monocrystal is grown, said second layer being a buffer layer having a surface with a smaller nucleation density than said first layer and having a layer thickness of at most 500 .ANG., wherein the surface of said buffer layer is constituted of a material having a nucleation density smaller by at least 10.sup.3 /cm.sup.2 than the nucleation density of said first layer;
- (b) forming by vapor deposition said single nucleus in said first layer utilizing the difference of nucleation density between said first and second layers;
- and
- (c) growing said monocrystal from said single nucleus on the exposed area of said first layer and onto the surface of said second layer by vapor deposition, whereby said buffer layer causes structural change during the growing of said monocrystal and reduces generation of stress at the interface with said growing monocrystal.
Dependencies are inferred from the claim text.