Disc streak pattern forming method and apparatus
AssigneeSpeedfam Corporation
InventorKiyoshi Ikemoto
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AssigneeSpeedfam Corporation
InventorKiyoshi Ikemoto
Estimating the term…
A disc streak pattern forming method and apparatus are provided which are capable of not only forming fine streak patterns on a disc in a single step, but also arbitrarily adjusting an angle of intersection of streak patterns in a precise manner to thereby reduce the cost of production facilities and the cost of manufacture as well as to improve the magnetic property and the finishing accuracy of the disc. The disc streak pattern forming apparatus is equipped with a drum 2, a pad rotating member 3, a first motor 5 and a second motor 6. Polishing pads 4 mounted on the pad rotating member 3 are placed in sliding contact with the disc in the form of a magnetic disc 200 with an information storage surface 201 thereof being disposed within a central bore 40 in each polishing pad 4. Thereafter, the drum 2 and the pad rotating member 3 are driven to rotate by means of the first and second motors 5, 6 so that the polishing pads 4 are caused to revolve around the center of the drum 2 while rotating on their own axes, respectively, thus forming desired streak patterns on the magnetic disc 200.
A disc streak pattern forming method for use in polishing an annular disc having a storage surface, a radially outer periphery and a radially inner periphery, and a center, the method comprising the steps of:
A disc streak pattern forming apparatus for use in polishing an annular disc having a surface, a radially outer periphery and a radially inner periphery, and a center, the apparatus comprising:
A disc streak pattern forming method for use in polishing an annular disc having a storage surface, a radially outer periphery and a radially inner periphery, and a center, the method comprising the steps of:
Dependencies are inferred from the claim text.