Multilayer pillar structure for improved field emission devices
AssigneeLucent Technologies Inc.
InventorsSungho Jin, Gregory Peter Kochanski, Wei Zhu
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Abstract
In accordance with the invention, a field emission device is provided with an improved pillar structure comprising multi-layer pillars. The pillars have a geometric structure that traps most secondary electrons and an exposed surface that reduces the number of secondary electrons. Processing and assembly methods permit low-cost manufacturing of high breakdown-voltage devices, including flat panel displays.
Claims3
A method for making a field emission device comprising an emitter cathode electrode, an anode electrode and a plurality of insulating pillars separating said electrodes, comprising the steps of:
- providing a multilayer pillar precursor comprising alternating layers of conducting and insulating material;
- cutting or etching pillar preforms from said precursor;
- forming grooves in said pillar preforms;
- and
- adhering said pillars on one of said electrodes.
Dependencies are inferred from the claim text.