Surface atom fabrication method and apparatus
AssigneeHitachi, Ltd.
InventorsMasakazu Ichikawa, Shigeyuki Hosoki, Fumihiko Uchida, Shigeo Kato, Yoshihisa Fujisaki, Sumiko Fujisaki, Atsushi Kikugawa, Ryo Imura, Hajime Aoi, Kiyokazu Nakagawa, Eiichi Murakami
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