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US 5,689,362 AGranted
Acousto-optic deflector device
AssigneeMurata Manufacturing Co., Ltd.
InventorMichio Kadota
Life of this patent
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Abstract
An acousto-optic deflector device having a piezoelectric thin film and IDT formed on a substrate for deflecting a light by causing an SAW generated at an SAW generator region to interact with the light at a light waveguide region. The piezoelectric thin film is constructed of a first piezoelectric thin film having a relatively high resistance and a high piezoelectricity in the SAW generator region, and a second piezoelectric thin film having a smaller light propagation loss than the first piezoelectric thin film 3a in the light waveguide region.
Claims8
An acousto-optic deflector device comprising:
- a substrate;
- a first piezoelectric thin film formed on the substrate and an interdigital transducer formed in contact with the first piezoelectric thin film to define a SAW generator region, said interdigital transducer being adapted to generate surface acoustic waves which are propagated through said first piezoelectric film along a propagation direction when an exciting voltage is applied thereto;
- a second piezoelectric thin film formed on the substrate in a light waveguide region which receives surface acoustic waves generated by the interdigital transducer;
- the first piezoelectric thin film exhibiting better piezoelectric characteristics and higher specific resistance than the second piezoelectric thin film, and the second piezoelectric thin film exhibiting less light propagation loss than the first piezoelectric thin film.
1 more element
Dependencies are inferred from the claim text.