Probe head, method for manufacturing the same, and inspecting method using the same
AssigneeTokyo Electron Limited
InventorKaoru Matsuda
Life of this patent
Estimating the term…
Abstract
Probes include proximal ends electrically connected to the respective conductive patterns of said insulating substrate, and free ends for being contact with the respective electrode pads of the object. The probes can be buckled in such a manner that the free ends are brought into contact with the respective electrode pads of the object under a predetermined contact pressure. Probes are formed from a wire for wire bonding by means of a wire bonder, and include proximal ends wire-bonded to each corresponding conductive patterns on the insulating substrate, and free ends formed by being cut after the wire is wire-bonded to a dummy substrate.
Claims14
A probe head for inspecting electrical properties of an object, said probe head comprising:
- an insulating substrate with a plurality of electrically conductive patterns formed thereon;
- a plurality of probes, each of the probes including a proximal end electrically connected to a corresponding one of said conductive patterns of said insulating substrate and a free end for contacting an electrode pad of the object;
- and
- a head body for accommodating the probes, the head body defining therein a plurality of concave grooves for holding the probes such that, when the probes are brought into contact with electrode pads of the object, the probes can buckle within the concave grooves so that the probes contact the electrode pads under a predetermined contact pressure.
A probe head for inspecting electrical properties of an object, said probe head comprising:
- an insulating substrate with a plurality of electrically conductive patterns formed thereon;
- a plurality of probes, each of the probes being formed from a wire, and including a proximal end wire-bonded to a corresponding one of said conductive patterns on the insulating substrate and a free end for contacting an electrode pad of the object;
- and
- a head body for accommodating the probes.
A method for manufacturing a probe head for inspecting electrical properties of an object, said method comprising:
- wire-bonding a first end of each of a plurality of wires to a conductive pattern formed on an insulating substrate;
- extending the wires over a head body;
- wire-bonding a second end of each of the wires to a dummy substrate;
- engaging each of the wires, with both ends thereof bonded to the substrates, in a groove of the head body;
- and
- cutting the second end from each of the wire so that each of the wires is usable as a probe.
Dependencies are inferred from the claim text.