Insulated-gate semiconductor device
AssigneeKabushiki Kaisha Toshiba
InventorsMitsuhiko Kitagawa, Ichiro Omura, Akio Nakagawa, Norio Yasuhara, Tomoki Inoue
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AssigneeKabushiki Kaisha Toshiba
InventorsMitsuhiko Kitagawa, Ichiro Omura, Akio Nakagawa, Norio Yasuhara, Tomoki Inoue
Estimating the term…
An insulated-gate semiconductor device comprises a P type emitter layer, an N.sup.- high-resistive base layer formed on the P type emitter layer, and a P type base layer contacting the N.sup.- high-resistive base layer. A plurality of trenches are formed having a depth to reach into the N.sup.- high-resistive base layer from the P type base layer. A gate electrode covered with a gate insulation film is buried in each trench. An N type source layer to be connected to a cathode electrode is formed in the surface of the P type base layer in a channel region between some trenches, thereby forming an N channel MOS transistor for turn-on operation. A P channel MOS transistor connected to the P base layer is formed in a channel region between other trenches so as to discharge the holes outside the device upon turn-off operation.
A semiconductor device comprising:
Dependencies are inferred from the claim text.