Apparatus for image transfer with charged particle beam, and deflector and mask used with such apparatus

An image transferring apparatus using a charged particle beam for transferring a pattern of a mask onto a target by using a charged particle beam, comprising:

• a charged particle beam optical system having a first lens and a second lens defining a cross-over therebetween, said first lens being disposed on the side of the mask with respect to said cross-over and said second lens being disposed on the side of the target with respect to said cross-over;
• and
• an angle adjusting deflector for deflecting the charged particle beam so that the main light path of the charged particle beam incident on said target substantially perpendicularly thereto passes through said cross-over, said deflector being disposed between said target and the principal plane of said second lens.

An image transferring apparatus using a charged particle beam in which a main visual field of a charged particle beam optical system having a cross-over is divided into a plurality of sub-fields and a pattern on a mask is divided into pattern segments in correspondence to the respective sub-fields, said pattern segments being successively transferred onto a target, wherein:

• said optical system has a first lens and a second lens defining said cross-over therebetween, said first lens being disposed on the side of the mask with respect to said cross-over and said second lens being disposed on the side of the target with respect to said cross-over;
• an angle adjusting deflector is disposed between said mask and the principal plane of said first lens of said charged particle beam optical system, and
• deflection sensitivity of said angle adjusting deflector is adjusted for each of said sub-fields so that a main light path of the charged particle beam is directed to said mask substantially perpendicularly thereto and passes through said cross-over for each of said plurality of sub-fields.