Method of forming fine patterns
AssigneesMitsubishi Denki Kabushiki Kaisha, Ryoden Semiconductor System Engineering Corporation
InventorsChikayuki Okamoto, Tadashi Nishioka, Satoru Kawazu
Life of this patent
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Abstract
Sidewalls of patterned resist are reformed using a reforming agent selected from the group consisting of (a) a carbon trichloride radical, (b) a mixture of silicon ion and oxygen ion, (c) a mixture of carbon ion and carbon monoxide ion, (d) a chlorine radical, (e) aluminum trichloride liquid and (f) dibutyl magnesium liquid, and sidewall reformed portions are thus formed on the sidewalls of pattern resist. The not reformed portion of the patterned resist is removed away, and sidewall reformed portions are left on an object layer. The portion of object layer excluding the portion immediately below sidewall reformed portions is etched away, and fine patterns of object layer are formed as a result.
Claims2
A method of forming a fine pattern, comprising the steps of:
- forming an object layer on a support member;
- forming on said object layer patterned resist having one sidewall and the other sidewall opposite to each other;
- etching away the portion of said object layer excluding the portion immediately below said patterned resist, using said patterned resist as mask, thereby forming a pattern of said object while reforming said one sidewall and the other sidewall of said patterned resist, thereby forming a first sidewall reformed portion on said one sidewall of said patterned resist and a second sidewall reformed portion on said the other sidewall of said patterned resist;
- removing the not reformed portion of said patterned resist, thereby leaving said first sidewall reformed portion and said second sidewall reformed portion on said pattern of the object;
- etching away the portion of said pattern of the object excluding the portion immediately below said first and second sidewall reformed portions, using said first and second sidewall reformed portions as mask, thereby forming a finer pattern of said object;
- and
- removing said first and second sidewall reformed portions.
Dependencies are inferred from the claim text.