Method of making an ultra-high vacuum field emission display
AssigneeMotorola, Inc.
InventorsYumiko Kato, Ronald O. Petersen
Life of this patent
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Abstract
A ultra-high vacuum field emission display (100, 200) is disclosed including an anode (102, 202), a cathode (106, 206), side members (112, 212), a first non-evaporable getter material (120, 220) which is activated during the sealing and evacuation of the package, and a second getter material (122, 222) which is activated during the normal operation of the ultra-high vacuum field emission display (100, 200). The second getter material (122, 222) is activated by subsequent heating provided by radio-frequency radiation, resistive heating, or a laser.
Claims12
A method for fabricating an ultra-high vacuum field emission display, the method including the steps of:
- providing a cathode;
- providing an anode;
- providing a plurality of side members;
- affixing the side members to the cathode and the anode so that the cathode, the anode, and the side members define an interspace region and provide a package;
- providing a first non-evaporable getter material in communication with the interspace region, the first nonevaporable getter material having an activation temperature;
- providing within the interspace region a vacuum having a value less than 10.sup.-5 Torr;
- and
- concurrent with the steps of affixing the side members and providing a vacuum, activating the first non-evaporable getter material thereby removing gaseous species outgassed during the steps of affixing the side members and providing a vacuum.
Dependencies are inferred from the claim text.