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US 5,688,557 AGranted
Method of depositing synthetic diamond coatings with intermediates bonding layers
OwnerJerome H. Lemelson, James G. Conleyinventors
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Abstract
A process is disclosed for making improved diamond coatings bonded to substrates by using intermediate bonding layers engineered to reduce the residual stress in the diamond coatings.
Claims1
A process for applying a diamond coating to a substrate comprising:
- a. coating said substrate with an intermediate coating selected from the group consisting of carbides and nitrides,
- b. applying said diamond coating by chemical vapor deposition (CVD) while continuously measuring at least one of the substrate internal temperature, the surface temperature of the substrate and the critical dimensions of the substrate and diamond coating;
- c. continuously calculating from said measurements by means of a computer an objective function related to the transient stress in said diamond coating;
- d. numerically applying to said objective function on a continuous basis a feedback optimization algorithm to yield control points for at least one of the substrate temperature, CVD gas composition, CVD gas flowrate, microwave radiation intensity, CVD operating pressure, substrate cooling rate and coating cooling rate, said optimization algorithm being designed to minimize the transient stress in said diamond coating;
- and
- e. continuously controlling at least one of said control points based on the results obtained from said optimization algorithm to minimize the transient stress in said diamond coating.
3 more elements
Dependencies are inferred from the claim text.