Apparatus for coating a substrate
AssigneeBalzers und Leybold Deutschland Holding AG
InventorsMartin Bahr, Gunter Brauer, Erwin Winter
Life of this patent
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Abstract
Pole shoes (3, 4, 5) of magnetically conductive material are provided inside of a first tubular target (2). Outside the target (2), a magnetic flux guide element (7) is provided, which has three pole shoes (8, 9, 10) directed toward the hollow body (1), which are connected to each other by magnets (12, 13). These magnets (12, 13) transmit the magnetic field through the target (2) to the pole shoes (3, 4, 5) inside the target (2) across narrow gaps (6, 11).
Claims16
Apparatus for coating a substrate (37) by sputtering the surface of a first tubular target which can be rotated around longitudinal axis (R), the sputtering being accomplished by means of electrical energy, where the first target (2) is provided with magnets (12, 13, 32, 33) to produce a sputtering zone (20) extending in the longitudinal direction of the target (2) and where a pair of magnets (12, 13) are associated with pole shoes (3, 4, 5) of magnetically conductive material inside the target (2) so that the magnetic field can be guided from the magnets (12, 13) to the sputtering zone (20) of the target (2), characterized in that the magnets (12, 13) are set up outside the target (2), and in that the magnetic field is transmitted through the target (2) to the pole shoes (3, 4, 5) inside the target (2) across gaps (6, 11).
Apparatus for coating a substrate by sputtering, said apparatus comprising
- a first tubular target rotatable about a central axis R, said target having a tubular inside surface and a tubular outside surface,
- a plurality of inner pole shoes extending parallel to said axis inside said target and separated from said inside surface by an inner gap,
- magnet means extending parallel to said axis outside said target, and
- a plurality of outer pole shoes extending parallel to said axis outside said target and separated from said outside surface by an outer gap, said outer pole shoes being arranged to transmit flux from said magnet means across said outer and inner gaps to said inner pole shoes, thereby creating a longitudinal sputtering zone parallel to said axis and outside said target opposite from said outer pole shoes.
Dependencies are inferred from the claim text.