Method for improving the performance of high temperature superconducting thin film wafers
AssigneeE. I. Du Pont de Nemours and Company
InventorPhilip Shek Wah Pang
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Abstract
A method for decreasing the microwave surface impedance of high-temperature superconducting thin films comprises (a) applying, preferably by spin-coating, a protective coating (preferably poly(methyl methacrylate) or polyimide) to the surface of a high-temperature superconducting thin film, such as Tl.sub.2 Ba.sub.2 CaCu.sub.2 O.sub.8 ; (b) exposing the coated thin film to low angle ion milling at an incident angle of 5.degree. to 30.degree. (preferably 10.degree. to 20.degree.) relative to the surface of the coated film; and (c) optionally including the step of removing any residual protective coating from the surface of the thin film, such as by exposure to an oxygen plasma.
Claims17
A method for removing asperities from the surface of a high temperature superconducting thin film, the method comprises exposing the surface of a high temperature superconducting film to an inert ion beam at an angle of incidence of from 5 to about 30 degrees relative to the surface of the thin film, wherein the high temperature superconducting film comprises a Tl--Ba--Ca--Cu--O superconductor.
A method for decreasing the microwave surface impedance of a high-temperature superconducting thin film, the method comprises the steps of
- a) applying a protective coating over the surface of a high-temperature superconducting thin film;
- and
- b) exposing the coated thin film to an inert ion beam at an angle of incidence of from 5 to 30 degrees with respect to the surface of the coated thin film.
A method for decreasing the microwave surface impedance of a high temperature superconducting thin film, the method comprises the steps of
- a) coating the surface of a high-temperature superconducting thin film with a 6% solution of poly(methyl methacrylate) followed by curing the spin-coated film at 170.degree. C. for about 30 minutes;
- and,
- b) exposing the coated thin film to an inert ion beam at an angle of incidence of from 5 to 30 degrees with respect to the surface of the coated thin film.
Dependencies are inferred from the claim text.