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AssigneeDainippon Screen Mfg. Co., Ltd.
InventorsTakefumi Kandori, Jyouitsu Sawa, Toshimasa Takeuchi
Estimating the term…
An elongated material treatment apparatus includes, a coating device for coating a photoresist on a main region in a principal surface of an elongated material with a photoresist, and a conveying device for transporting the elongated material from a cleaning device to the coating device while supporting a transport support region in the principal surface cleaned by the cleaning device, there is a cleaning fluid removing device between the cleaning device and the coating device for removing a cleaning fluid deposited on the transport support region, whereby the elongated material is prevented from slipping during the transport of the elongated material by the conveying device and is correctly transported. The elongated material is transported to the coating device, with the cleaning fluid left in the main region, permitting uniform coating of the photoresist on the main region.
An elongated material treatment apparatus for treating an elongated material having a principal surface comprising a main region and a transport support region, said apparatus cleaning said principal surface to produce a cleaned principal surface and then coating said main region of said cleaned principal surface with a photoresist while transporting said elongated material in its longitudinal direction, said elongated material treatment apparatus comprising:
Dependencies are inferred from the claim text.