US 5,688,319 AGranted

Method for testing electrical properties of silicon single crystal

AssigneeShin-Etsu Handotai Co., Ltd.

InventorsIzumi Fusegawa, Hirotoshi Yamagishi, Nobuyoshi Fujimaki, Yukio Karasawa

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Abstract

The evaluation of the oxide film dielectric breakdown voltage of a silicon semiconductor single crystal is caried out by cutting a wafer out of the single crystal rod, etching the surface of the wafer with the mixed solution of hydrofluoric acid and nitric acid thereby relieving the wafer of strain, then etching the surface of the wafer with the mixed solution of K.sub.2 Cr.sub.2 O.sub.7, hydrofluoric acid, and water therby inducing occurrence of pits and scale-like patterns on the surface, determining the density of the scale-like patterns, and computing the oxide film dielectric breakdown voltage by making use of the correlating between the density of scale-like patterns and the oxide film dielectric breakdown voltage. This fact established the method of this invention to be capable of effecting an evaluation equivalent to the evaluation of the oxide film dielectric breakdown voltage of a PW wafer prepared from the single crystal rod.

Claims2

Dependent claims

A method of testing electrical properties of a silicon crystal, characterized by the following steps carried out after pulling up a silicon semiconductor single crystal by the Czochralski method or the floating zone pulling method, said steps comprising:

cutting a wafer of a first thickness from said single crystal;
etching the surface of the wafer with a mixed solution of hydrofluoric acid and nitric acid, thereby relieving said wafer of strain;
supporting the wafer with the surface in a vertical direction;
selectively etching the vertical surface of the wafer in a mixed solution of K.sub.2 Cr.sub.2 O.sub.7, hydrofluoric acid, and water;
counting the number of scale-like patterns, per unit area, appearing on the surface of the wafer;
obtaining a correlation of the number of scale-like patterns to the acceptability rate of oxide film dielectric breakdown voltage, wherein the number of scale-like patterns is obtained by said selective etching step with respect to a plurality of wafers;
and
evaluating the acceptability of oxide film dielectric breakdown voltage from the number of scale-like patterns counted in said counting step on the basis of said correlation obtained in said obtaining step.

5 more elements

Dependencies are inferred from the claim text.