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US 5,688,106 AGranted
Turbomolecular pump
AssigneeVarian Associates, Inc.
InventorsRoberto Cerruti, Giampaolo Levi
Life of this patent
Estimating the term…
Abstract
A turbomolecular pump comprises a pump body housing a gas inlet and a gas exhaust port and a plurality of pumping assemblies with interleaved rotors and stators located within the pump body. The rotors are secured to a rotating shaft that is supported by at least one rotatable support and driven by a motor. At least one stator of the pumping assemblies is provided with at least one spiral channel adapted to push and eject the gases from an area proximal to the shaft toward an area distal from the shaft and vice versa.
Claims16
A turbomolecular pump comprising:
- a pump body having a gas inlet port and a gas exhaust port;
- a plurality of vacuum pumping stages within said body disposed between said inlet port and exhaust port, each said pumping stage comprising a rotor and a stator, said stator having a pair of opposite faces;
- at least one stator of said plurality of vacuum pumping stages having at least one spiral channel formed on one of said faces of said at least one stator;
- a rotating shaft for securing each rotor of said plurality of vacuum pumping states thereto;
- at least one support means for holding said rotating shaft;
- and
- a plate which is positioned between said at least one support means for holding said rotating shaft and said pumping stage proximate thereto, said plate has at least one spiral channel formed on a surface facing said proximate pumping stage for pushing and ejecting gases contained in said at least one channel from an area proximal to said shaft to an area distal therefrom.
4 more elements
A turbomolecular pump comprising:
- a pump body having an inlet port and an exhaust port;
- first and second pumping assemblies disposed within said pump body in proximity to said inlet and exhaust ports respectively;
- each said pumping assembly has a plurality of rotors and stators, each rotor of said pumping assemblies being adjacent to a respective stator, each rotor of said first pumping assembly comprising a rotor disk with blades, and each rotor of said second pumping assembly comprising a flat rotor disk;
- a rotating shaft for securing a plurality of rotors of said first and second pumping assemblies thereon;
- a supporting means for holding said rotating shaft;
- a plate positioned between said rotating shaft and supporting means, said plate having at least one spiral channel on a surface facing said rotor of said second pumping assembly proximal thereto for pumping gases outwardly from an area proximal to said rotating shaft;
- and
- said stator of said second pumping assembly proximal to said plate comprising at least one spiral channel formed on a first surface facing said plate for pumping gases inwardly to an area proximal to said rotating shaft, and a plurality of channels formed on a second surface opposite to said first surface for pumping gases outwardly from an area proximal to said rotating shaft.
5 more elements
A turbomolecular pump comprising:
- a pump body having gas inlet and gas exhaust ports;
- pumping assemblies located within said pump body and formed by a respective plurality of stators and rotors, each said stator being adjacent to a respective rotor and comprising a pair of opposed faces, said pumping assemblies comprising a first pumping assembly in proximity to said gas inlet port and a second pumping assembly in proximity to said gas exhaust port, rotors of said first pumping assembly comprising rotor disks with blades and rotors of said second pumping assembly comprising flat rotor disks;
- a rotating shaft, said plurality of rotors being secured to said rotating shaft;
- at least one support for said rotation shaft;
- a plate positioned between said second pumping assembly and said at least one support;
- and
- at least one of said stators being positioned in proximity to said plate comprising at least one spiral channel facing said plate, wherein said plate comprises at least one spiral channel.
4 more elements
Dependencies are inferred from the claim text.